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Global

HiPace 700

Turbomolecular vacuum pumps

Or call us directly: +49 6441 802-0

Reliable

Best-in-class hybrid bearing technology, superior bearing lubrication for long life cycle

High gas throughput

High pumping speed, compatible with a variety of backing pumps, high compression for light gases

High performance

Optimized rotor geometry, enhanced gas load handling

Technical specifications

Markets & applications

Analytics and R&D
  • Laboratory Vacuum
  • Plasma Physics
  • High Energy Physics
  • Mass Spectrometry
  • Space Research
  • Ultra-High Vacuum
Automotive and transport
  • Heat Treatment
  • Leak Detection and EoL Testing
  • Space Research
  • E-Beam Welding
  • 3D Printing
Electric power generation
  • Green Energy Generation
Hospitals and healthcare facilities
  • Mass spectromer
  • Medical Accelerator
  • Diagnostic Imaging
Hydrogen
  • Leak Detection and EoL Testing (Master)
Lithium-ion battery production
  • Leak Detection and EoL Testing (Master)
Metallurgy
  • E-beam welding
  • Vacuum Brazing / Soldering
  • 3D Printing
  • Heat Treatment
Pharmaceutical industry
  • Laboratory Vacuum
Refridgeration
  • Leak Detection and EoL Testing
Scientific instruments
  • Mass Spectrometry
  • Surface Analysis
Semiconductor applications
  • PVD
  • Inspection & Metrology
  • Metal & high K etch
  • LPCVD / Diffusion
  • Lithography
  • Oxyde Etch
  • Stripping / Ashing
  • ALD
  • PECVD
  • Si Poly etch
  • Load Lock & Transfer
  • Light deposition
  • Ion Implantation
Technical gases
  • Bottle Filling
Thin film coating
  • Lab coating

Accessories

  • Electrical adapter
  • Mains cable
  • Connecting cable
  • Various fieldbus systems
  • Power supply kit and display unit
  • Mounting kit
  • Safety valve
  • Venting accessories
  • Power failure venting unit
  • Vibration damper