Reliable
Best-in-class hybrid bearing technology, long life cycle, maximum uptime
Easy maintenance
On-site bearing change, insensitive to process dust
High performance
Specially designed for coating processes, optimized rotor/stator concept
Technical specifications
Markets & applications
Semiconductor applications
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PVD
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Inspection & Metrology
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Metal & high K etch
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LPCVD / Diffusion
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Lithography
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Oxyde Etch
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Stripping / Ashing
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ALD
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PECVD
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Si Poly etch
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Load Lock & Transfer
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Light deposition
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Ion Implantation