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Dry Screw Vacuum Pumps for Semiconductor Manufacturing

Engineered for the most demanding processes in semiconductor manufacturing, including microchip production, silicon wafer coating, and etching.

Screw Pumps Cobra Semicon Stage

Advanced vacuum technology for the semiconductor industry

COBRA Semicon 真空泵的工作原理基于我们最先进的螺杆技术。凭借其获得专利的自平衡螺杆,它们在半导体制造的效率和运行可靠性方面树立了新的标杆

COBRA Semicon 真空泵兼具大气量与高蒸汽和颗粒耐受力, 因此,它们可以顺利抽取含颗粒的介质。无油和非接触式运行的工作原理可确保低维护需求、低运行成本及长使用寿命。

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Cobra Bc 1000 F Technology

COBRA BC 1001 G

Types of dry screw vacuum pumps

In addition to the various processes in semiconductor manufacturing, COBRA Semicon dry screw vacuum pumps are also the ideal choice for applications in the production of photovoltaic cells, flat panel display production, and numerous coating applications.

Product series

Nominal pumping speed

COBRA BC

100 m3/h - 1,580 m3/h

COBRA DS

70 m3/h - 6,000 m3/h

了解我们的 COBRA Semicon 系列

COBRA BC

适用于轻型至中型半导体应用的理想解决方案

Cobra Bc 1200 A
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COBRA DS

适用于严苛的半导体工艺的新一代干式真空泵

Cobra Ds 1200 A Product Finder
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COBRA BC

适用于轻型至中型半导体应用的理想解决方案

  • 先进的螺杆设计

  • 采用干式和非接触式工作原理

  • 独特的“悬空轴承”设计

  • 悬臂结构

  • 紧凑的就地安装设计

  • 直接水冷

  • 开放的通信协议

Cobra Bc 0101 G Content

COBRA 0101 BC G

COBRA DS

适用于严苛的半导体工艺的新一代干式真空泵

  • 先进的螺杆设计

  • 采用干式和非接触式工作原理

  • 出色的粉末处理能力

  • 高效的间接水冷

  • 紧凑的就地安装设计

  • 高抽氢速率

  • 高效率电机

  • 不同尺寸并集成罗茨泵可选

Cobra Ds 1200 A Content

COBRA DS 1200 A

Semiconductor applications

Semiconductor manufacturing requires both a contamination-free environment and high vacuum levels. Our COBRA Semicon dry screw vacuum pumps meet these requirements. Contact our experts to find the perfect vacuum solution for you.

Find out more about how dry screw vacuum technology is used in different semiconductor applications:

Semiconductor

Seeking dry screw vacuum pumps for other applications?

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Cobra Industry

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