Dry Screw Vacuum Pumps for Semiconductor Manufacturing
Engineered for the most demanding processes in semiconductor manufacturing, including microchip production, silicon wafer coating, and etching.
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Advanced vacuum technology for the semiconductor industry
COBRA Semicon 真空泵的工作原理基于我们最先进的螺杆技术。凭借其获得专利的自平衡螺杆，它们在半导体制造的效率和运行可靠性方面树立了新的标杆。
COBRA Semicon 真空泵兼具大气量与高蒸汽和颗粒耐受力， 因此，它们可以顺利抽取含颗粒的介质。无油和非接触式运行的工作原理可确保低维护需求、低运行成本及长使用寿命。
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COBRA BC 1001 G
Types of dry screw vacuum pumps
In addition to the various processes in semiconductor manufacturing, COBRA Semicon dry screw vacuum pumps are also the ideal choice for applications in the production of photovoltaic cells, flat panel display production, and numerous coating applications.
Product series | Nominal pumping speed |
COBRA BC | 100 m3/h - 1,580 m3/h |
COBRA DS | 70 m3/h - 6,000 m3/h |
了解我们的 COBRA Semicon 系列
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COBRA BC
适用于轻型至中型半导体应用的理想解决方案
先进的螺杆设计
采用干式和非接触式工作原理
独特的“悬空轴承”设计
悬臂结构
紧凑的就地安装设计
直接水冷
开放的通信协议
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COBRA 0101 BC G
所有 COBRA BC 产品
- 1361800401
- 1361800493
- 1361800605
- 1361800409
COBRA DS
适用于严苛的半导体工艺的新一代干式真空泵
先进的螺杆设计
采用干式和非接触式工作原理
出色的粉末处理能力
高效的间接水冷
紧凑的就地安装设计
高抽氢速率
高效率电机
不同尺寸并集成罗茨泵可选
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COBRA DS 1200 A
所有 COBRA DS 产品
- 1361800250
- 1361800254
- 1361800185
- 1361800258
- 1361800261
- 1361800415
- 1361800480
- 1361800574
- 1361800265
- 1361800580
- 1361800919
- 1361800932
- 1361800483
Semiconductor applications
Semiconductor manufacturing requires both a contamination-free environment and high vacuum levels. Our COBRA Semicon dry screw vacuum pumps meet these requirements. Contact our experts to find the perfect vacuum solution for you.
Find out more about how dry screw vacuum technology is used in different semiconductor applications:
Rapid thermal annealing (RTA)
Rapid thermal processing (RTP)
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