Residual gas analysis in ultra high vacuum - Pfeiffer Vacuum

Residual gas analysis in ultra high vacuum

This modularly designed compact mass spectrometer can be optimally adapted to your application
This modularly designed compact mass spectrometer can be optimally adapted to your application
This modularly designed compact mass spectrometer can be optimally adapted to your application

Quadrupole mass spectrometers with a secondary electron multiplier offer maximum detection sensitivity in the qualitative analysis of gas composition in an ultra-high vacuum chamber.

For residual gas analysis under high vacuum, extremely small amounts of gas must be detected. A secondary electron multiplier in the Pfeiffer Vacuum residual gas analyzers therefore guarantees a high amplification of the small ion currents supplied by the quadrupole mass filters. All materials used are carefully selected for use in UHV and can withstand high bake-out temperatures.

 
Several ion sources are available for different applications, including a grid ion source with an extremely low outgassing rate.

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