Diaphragm Pumps - Pfeiffer Vacuum

Diaphragm Pumps

Dry and oil-free diaphragm pumps with a pumping speed of 0.7 to 10.4 m³, ideally suited for use as a stand-alone solution and for integration into compact systems.

As backingpump for HiPace turbopumps

Dry and oil-free diaphragm pumps with a pumping speed of 0.6 bis 1.8 m³, ideally suited for use as backing pumps for Pfeiffer Vacuum turbopumps and for integration into compact systems.
Extensive accessories for optimal adaptation of the pump.

The Ideal Backing Pumps for Turbopumps

Through its compactness, the diaphragm pump from Pfeiffer Vacuum is ideal for integration in increasingly small analytical systems and turbopumping stations. Beginning with a pumping speed of 0.25 m3 per hour, you can choose from a wide selection of pumps. The strongest of these vacuum pumps manages a pumping speed of max. 4.3 m3/h. The benefits of the diaphragm pump from Pfeiffer Vacuum are numerous, the efficiency and reliability unique.

Customer benefits

  • Absolutely dry, oil-free vacuum
  • Long lifespan of the diaphragm
  • Low vibration and sound
  • High operating safety
  • Maintenance-friendly through easy diaphragm and valve exchange
  • Worldwide usage through dual voltage motors or DC drives


  • Ideal as a backing pump for many turbopumps
  • Systems and pumping stations
  • Laboratories
  • Research & development
  • Analytics
  • Chemical industry
  • Leak detection
  • Practically in all areas in which a dry, oil-free vacuum and uncontaminated pumping of gases is needed

The diaphragm pump for a dry, clean vacuum
The long lifespan of the diaphragm pump, however, is only one of the many benefits. The pumps work completely without oil. Through this, they are ideal for all types of work in which a clean and dry vacuum is needed. The uncontaminated pumping of gases in laboratories, analytics and the chemical industry illustrates only one area of application. This vacuum pump is also used for leak detection or for research and development. At sensitive locations, the diaphragm pump not only performs its work reliably, but with a minimum of vibration and noise. This vacuum pump is the optimal addition as a backing pump for Pfeiffer Vacuum turbopumps.

The vacuum pump can be used worldwide
The long lifespan of the diaphragm makes this vacuum pump particularly interesting. Other benefits include mature technology, oil-free and absolutely dry vacuum creation along with the high operating safety of the pump. In addition to this is the uncomplicated maintenance of the diaphragm pump. Both the diaphragm and the valves can be replaced easily - complex work is not necessary. The worldwide usage of the pumps is guaranteed through dual-voltage motors or the DC drive.

Comprehensive accessories
Pfeiffer Vacuum additionally offers comprehensive accessories for diaphragm pumps. Because special orders require the use of additional parts or components. Special power cords also belong to the selection along with hose connections, flushing gas nozzles or relay boxes. Successful vacuum creation is a demanding task. With Pfeiffer Vacuum, you have the perfect partner at your side.

Social Networks: