Integrated pumps for harsh cyclic pumping processes
The integrated pumps with their compact dimensions were specifically developed for flexible integration in semiconductor production facilities. Designed for direct installation on the tool or in the fabs’ subfloor, this series of compact pumps allows frequent fast pump down cycles. It is the perfect solution for load-lock and transfer chambers as well as for all other non-corrosive applications.
New solution for high throughput applications
Demonstrating again its worldwide leadership in the integrated dry pump market, Pfeiffer Vacuum introduced the A 200 L, the 200 m3/h class product for high throughput applications and frequent pumping cycles. With the 100 m3/h class, A 100 L and the 200 m3/h class, A 200 L, Pfeiffer Vacuum provides a complete range to respond to all types of load-lock and transfer chambers.
- High throughput
- Small dimensions
- Optimized assembly
- Low cost of ownership
- Load-lock and transfer chambers
- Semiconductor production
State of the art pumps
Since the market introduction of the A 100 L pumps, they have revolutionized the integration of pumps in production facilities for the semiconductor industry. Based on dry multi-stage Roots technology and despite their small footprint, the pumps offer high pumping speeds and short pump down times. Today, integrated light duty pumps are state of the art and the A 200 L series is installed worldwide in many 300 mm semiconductor fabs.
For load-lock and transfer chamber applications
In light duty applications like load-lock and transfer chambers, these pumps rule out vacuum line effects in pump installations. Installation costs for vacuum lines, integration and commissioning are lowered through the use of integrated pumps. The pumps offer reproducible performance during production and are energy efficient. High reliability and long-term stability distinguish the integrated pumps.
Integrated pumps - not just for the semiconductor industry
Low sound emission and low vibrations are additional benefits. Like with the ACP series, these compact pumps can be used for high value gas recovery or recycling. The small dimensions guarantee an easy integration in production facilities.