A 100 L
A pioneer in the vacuum pump market. Focused on increasing tool up-time, the A 100 L does not require any on-site preventive maintenance and features the highest reliability of its class, with a MTBF of more than 195,000 hours.
Applications
- Load lock chamber and transfer chamber in semiconductor industry
- Load lock and sputtering chamber in solar photovoltaic applications
- Cryogenic applications and use in fundamental research laboratories
- Industry (cryogenic, gas manufacturers, laser sources)
- Analytical instrumentation (load lock chamber for electronic microscopy or surface analysis)
Customer value
- High performance
- Reliable
- Energy Efficient
- Compact
- Stackable
- Low vibration and noise level
- Plug and play system: integrated monitoring
- Optional RS232/RS485 interface
Product description
- The reference in the integrated dry pump market
- High pumping speed 100 m3/h
Product
A 100 L ES Energy Saving versionFurther information Less information
Compact light duty dry pump with pumping speed of 100 m3/h and Energy Saving option
- Integrated and automatic Energy Saving Module reduces power consumption by 50 %
- Pump is equipped with water cooling circuit
- Hour counter and three color LEDs provide information about pump status on its front pannel
- Interface connector 16 pins or 19 pins provides discrete Input/Output information towards the tool
- Optional RS232 or RS485 serial interface provides control and monitoring functions
A 100 L Standard versionFurther information Less information
Compact light duty dry pump with pumping speed of 100 m3/h
- Pump is equipped with water cooling circuit.
- Hour counter and three color LEDs provide information about pump status on its front pannel
- Interface connector 16 pins or 19 pins provides discrete Input/Output information towards the tool
- Optional RS232 or RS485 serial interface provides control and monitoring functions