Multi-stage Roots Pumps A 100 L - Pfeiffer Vacuum

A 100 L

A pioneer in the vacuum pump market. Focused on increasing tool up-time, the A 100 L does not require any on-site preventive maintenance and features the highest reliability of its class, with a MTBF of more than 195,000 hours.

Applications

  • Load lock chamber and transfer chamber in semiconductor industry
  • Load lock and sputtering chamber in solar photovoltaic applications
  • Cryogenic applications and use in fundamental research laboratories
  • Industry (cryogenic, gas manufacturers, laser sources)
  • Analytical instrumentation (load lock chamber for electronic microscopy or surface analysis)

Customer value

  • High performance
  • Reliable
  • Energy Efficient
  • Compact
  • Stackable
  • Low vibration and noise level
  • Plug and play system: integrated monitoring
  • Optional RS232/RS485 interface

Product description

  • The reference in the integrated dry pump market
  • High pumping speed 100 m3/h

Product

A 100 L ES Energy Saving version

Compact light duty dry pump with pumping speed of 100 m3/h and Energy Saving option
  • Integrated and automatic Energy Saving Module reduces power consumption by 50 %
  • Pump is equipped with water cooling circuit
  • Hour counter and three color LEDs provide information about pump status on its front pannel
  • Interface connector 16 pins or 19 pins provides discrete Input/Output information towards the tool
  • Optional RS232 or RS485 serial interface provides control and monitoring functions

A 100 L Standard version

Compact light duty dry pump with pumping speed of 100 m3/h
  • Pump is equipped with water cooling circuit.
  • Hour counter and three color LEDs provide information about pump status on its front pannel
  • Interface connector 16 pins or 19 pins provides discrete Input/Output information towards the tool
  • Optional RS232 or RS485 serial interface provides control and monitoring functions
Your local contact
Pfeiffer Vacuum Inc.
24 Trafalgar Square
NH 03063-1988 Nashua
USA

+1 (800) 248-8254
+1 (888) 658-7983
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