A 200 L

Based on A 100 L design, A 200 L meets higher pumping capacity as well as very high pumping cycles. The pump does not require any on-site preventive maintenance and equals A 100 L reliability, with a MTBF of more than 195,000 hours.

Applications

  • Load lock chamber and transfer chamber in semiconductor industry
  • Load lock and sputtering chamber in solar photovoltaic applications
  • Cryogenic applications and use in fundamental research laboratories
  • Industry (cryogenic, gas manufacturers, laser sources)

Customer value

  • High performance
  • Reliable
  • Energy Efficient
  • Compact
  • Stackable
  • Low vibration and noise level
  • Plug and play system: integrated monitoring
  • Optional RS-232/RS-485 interface

Product description

  • High pumping cycle frequency of small load lock
  • High pumping speed 200 m3/h

Product

A 200 L - Standard version

Compact light duty dry pump with pumping speed of 200 m3/h
  • Maximum cycling frequency (20 l volume) : 300 cycles per hour
  • Pump is equipped with water cooling circuit.
  • Hour counter and three color LEDs provide information about pump status on its front pannel
Your local contact
Pfeiffer Vacuum Inc.
24 Trafalgar Square
NH 03063-1988 Nashua
USA

+1 (800) 248-8254
+1 (888) 658-7983
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