A3P Series

A3P series dry pump reduce operating costs

Advanced technology with high energy efficiency for medium duty processes
With the pumps from the A3P series, Pfeiffer Vacuum offers a pump series from three models, which are distinguished through drastically reduced operating costs. Compared to previous pump technologies, energy savings of up to 50% are possible. The pumps integrate the most modern knowledge for process suitability. Furthermore, they allow for a saving in space through its compact construction.


  • Low operating costs
  • Small footprint
  • Light weight for simpler assembly
  • High reliability in medium duty applications
  • Compatible with the requirements for semiconductor production


  • Semiconductor industry (etching, implant, PVD, ...)
  • Photovoltaic

Dry pump for the semiconductor industry
The dry pump of the A3P series are based on the proven multi-stage Roots technology. The inside of the pump is resistant to corrosive gases. For this reason, the pump have high reliability on medium duty processes. The available model from the series offer a wide spectrum of pumping speeds and thereby cover most requirements for medium duty vacuum pumps in the semiconductor industry. The A3P series is suitable for operation in a clean room and complies with CE and Semi S2 standards.

Designed for high reliability on medium duty processes
The dry pump are distinguished through their high reliability for applications in medium duty processes. The pump from the series have a temperature sensor and inert gas flushing. A low noise emission and low vibration level are further characteristics of the A3P series.

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