Dry Screw Vacuum Pumps for Semiconductor Manufacturing
Engineered for the most demanding processes in semiconductor manufacturing, including microchip production, silicon wafer coating, and etching.
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Advanced vacuum technology for the semiconductor industry
The operating principle of COBRA Semicon vacuum pumps is based on our state-of-the-art screw technology. With their patented self-balancing screws, they set new standards in terms of efficiency and reliability for semiconductor manufacturing.
COBRA Semicon vacuum pumps combine large throughputs with high vapor and particle tolerance. Particle-laden media can therefore be evacuated without any problems. The oil- and contact-free operating principle ensures low maintenance requirements, low operating costs and a long life cycle.
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COBRA BC 1001 G
Types of dry screw vacuum pumps
In addition to the various processes in semiconductor manufacturing, COBRA Semicon dry screw vacuum pumps are also the ideal choice for applications in the production of photovoltaic cells, flat panel display production, and numerous coating applications.
Product series | Nominal pumping speed |
COBRA BC | 100 m3/h - 1,580 m3/h |
COBRA DS | 70 m3/h - 6,000 m3/h |
Discover our COBRA Semicon series
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COBRA BC
The ideal solution for light to medium semiconductor applications
Advanced screw design
Dry and contact-free operating principle
Unique “flying bearing” design
Cantilever construction
Compact fit-in-place design
Direct water cooling
Fully open communication protocol
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COBRA 0101 BC G
All COBRA BC products
- 1361800401
- 1361800493
- 1361800605
- 1361800409
COBRA DS
The new generation of dry vacuum pumps for harsh semiconductor processes
Advanced screw design
Dry and contact-free operating principle
Excellent powder handling
Effective indirect water cooling
Compact fit-in-place design
High pumping speed for the discharge of hydrogen
High-efficiency motor
Sizes with integrated vacuum booster available
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COBRA DS 1200 A
All COBRA DS products
- 1361800250
- 1361800254
- 1361800185
- 1361800258
- 1361800261
- 1361800415
- 1361800480
- 1361800574
- 1361800265
- 1361800580
- 1361800919
- 1361800932
- 1361800483
Semiconductor applications
Semiconductor manufacturing requires both a contamination-free environment and high vacuum levels. Our COBRA Semicon dry screw vacuum pumps meet these requirements. Contact our experts to find the perfect vacuum solution for you.
Find out more about how dry screw vacuum technology is used in different semiconductor applications:
Rapid thermal annealing (RTA)
Rapid thermal processing (RTP)
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