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Hybrid Bearing Turbopumps - Pfeiffer Vacuum

Turbopumps with hybrid bearing

Starter kits for turbopumps
Our starter kits offer you a flexible selection of complete packages for all different types of applications. Each consists of a HiPace turbopump, including all accessories necessary for operation. Simply select the starter kit with the turbopump you need, and you will receive a connection cable and air cooling, as well as the matching display control unit with integrated power supply. All starter kit components are designed for optimal compatibility and allow for installation in all positions as well as for easy commissioning of the turbopump.
  • Starter kits are available in ISO-K, ISO-F and CF flange variants with diameters of DN 63 to DN 160.

SplitFlow™

HiPace® 10
Small and robust turbopump with a pumping speed of 10 l/s for N2
  • The small design makes for minimum footprint
  • Particularly insensitive to vibration, ideal for mobile applications
  • Integrated drive electronics
  • Semi S2 and UL/CSA certification
  • Maximum reliability through monitoring of operating data

HiPace® 30
Small, high-performance turbopump with a pumping speed of up to 32 l/s for N2
  • Minimum space requirement due to extremely compact design
  • Integrated drive electronics
  • Maximum reliability through monitoring of operating data

HiPace® 60 P
Small yet powerful turbo molecular pump without Holweck-stage with a pumping speed of up to 64 l/s for N2
  • The small design makes for minimum footprint
  • Integrated drive electronics

HiPace® 80
Compact yet powerful turbopumps with pumping speeds of up to 67 l/s for N2
  • Compact design for minimum footprint
  • High pumping speed and maximum compression for all gases
  • Integrated drive electronics
  • Semi S2 and UL/CSA certification
  • Ideal for all standard applications

HiPace® 80 Neo
Compact yet powerful turbopumps with pumping speeds of up to 67 l/s for N2
  • Compact design for minimum footprint
  • High pumping speed and maximum compression for all gases
  • Integrated drive electronics, suitable for industrial environments - Protection class IP54
  • Semi S2 and UL/CSA certification
  • Ideal for all standard applications
  • Laser balancing technology

HiPace® 300
Compact yet powerful turbopumps with pumping speeds of up to 260 l/s for N2
  • Maximum reliability in a compact design
  • Maximum reliability through monitoring of operating data
  • Available with multiple electronic drive unit options
  • Suitable for industrial environments - Protection class IP54
  • Semi S2 and UL/CSA certification

HiPace® 350
Compact yet powerful turbopumps with pumping speeds of up to 300 l/s for N2
  • Robust, high-performance turbopump with a pumping speed of up to 300 l/s for N2
  • Compact and powerful
  • Exceptional pumping speed for light gases

HiPace® 450
Compact yet powerful turbopumps with pumping speeds of up to 380 l/s for N2
  • Robust, high-performance turbopump with a pumping speed of up to 380 l/s for N2
  • Compact and powerful
  • Exceptional pumping speed for light gases

HiPace® 700
Maximum vacuum performance in a compact design with a pumping speed of 685 l/s for N2
  • Minimum footprint and maximum reliability
  • High gas throughput and high pumping speed
  • Suitable for industrial environments - Protection class IP54
  • Semi S2 and UL/CSA certification
  • Maximum reliability through monitoring of operating data

HiPace® 800
Maximum vacuum performance in a compact design with a pumping speed of 790 l/s for N2
  • Minimum footprint and maximum reliability
  • High gas throughput and high pumping speed
  • Suitable for industrial environments - Protection class IP54
  • Semi S2 and UL/CSA certification
  • Maximum reliability through monitoring of operating data

HiPace® 1200
Powerful turbopumps with pumping speeds of up to 1,300 l/s.
  • High pumping speeds for both light and heavy gases
  • High process integrity, resistant to particulate matter
  • High gas throughputs, even for heavy gases
  • Semi S2 and UL/CSA certification
  • Maximum reliability through monitoring of operating data

HiPace® 1500
Powerful turbopumps with pumping speeds of up to 1450 l/s.
  • High pumping speeds for both light and heavy gases
  • High process integrity, resistant to particulate matter
  • High gas throughputs, even for heavy gases
  • Semi S2 and UL/CSA certification
  • Maximum reliability through monitoring of operating data

HiPace® 1800
Powerful turbopumps with pumping speeds of up to 1700 l/s.
  • High pumping speeds for both light and heavy gases
  • High process integrity, resistant to particulate matter
  • High gas throughputs, even for heavy gases
  • Semi S2 and UL/CSA certification
  • Maximum reliability through monitoring of operating data

HiPace® 2300
Powerful turbopumps with pumping speeds of up to 2050 l/s.
  • High pumping speeds for both light and heavy gases
  • High process integrity, resistant to particulate matter
  • High gas throughputs, even for heavy gases
  • Semi S2 and UL/CSA certification
  • Maximum reliability through monitoring of operating data

HiPace® 2800 IT
Powerful turbopumps with pumping speed up to 2800 l/s.
  • Ideal for ion implantation systems
  • Optimized pumping speed for light gases
  • The nickel-plated rotor guarantees resistivity to the dopants used
  • The intelligent temperature management system reduces process condensation and deposits
  • Semi S2 and UL/CSA certification

HiPace stands for a full range of compact and powerful turbopumps in the pumping speeds range of 10 to 2,050 l/s. It provides high cost-efficiency and flexibility, which allows almost all pumps of this range to be installed in any orientation. The proven bearing system guarantees unrivaled reliability. High pumping speeds, high backing pump compatibility and high gas throughput as well as excellent compression for light gases are made possible by the innovative rotor design.
 

What is hybrid bearing?
The combination of a ceramic ball bearing on the fore-vacuum side and a permanent magnetic radial bearing on the high vacuum side is called hybrid bearing.
 

This bearing technology does not require electromagnets and has a long service life with maintenance intervals of approximately 4 years. The ball bearing and the operating fluid reservoir can be replaced on site within less than 30 minutes.
 

Turbopumps with hybrid bearing

Fast run-up time

The run-up time of the HiPace has been significantly reduced. It makes the pumps ready for action more quickly. This is an incalculable benefit for your production. In addition, we provide extended remote and sensor functionalities which allow you to assess pump data such as temperature, for example. The improved diagnostics make it possible to improve pump availability and support service.

High-performance technology

We are setting trends with the well thought-out design of the HiPace. The functional housing is partly responsible, as it makes the pumps extremely light and extends the application spectrum. Also, the innovative rotor geometry provides quiet operation and sets standards for significantly improved gas loads.

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