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PM P06 117
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HiPace® 1500 U with TC 1200, E74, DN 250 ISO-F
Order number: PM P06 117

  • High-performance turbopump with a pumping speed of up to 1250 l/s for N2
Bearing Hybrid
Certification Semi S2 compatible
TÜV
CSA
UL
Compression ratio for Ar 1 · 108
Compression ratio for CF4 1 · 108
Compression ratio for H2 6 · 103
Compression ratio for He 6 · 104
Compression ratio for N2 1 · 108
Connection flange (in) DN 250 ISO-F
Connection flange (out) DN 40 ISO-KF
Cooling method Water
Cooling water connection G 1/4”
Cooling water flow 100 l/h
Cooling water flow, max. 100 l/h
Cooling water flow, min. 100 l/h
Cooling water temperature 15-35 °C | 59-95 °F | 288-308 K
Current, max. 10 A
Electronic drive unit TC 1200
Final pressure 1 · 10-7 hPa | 7.5 · 10-8 Torr | 1 · 10-7 mbar
Fore-vacuum max. for N2 2 hPa | 1.5 Torr | 2 mbar
I/O interfaces E74, RS-485
Input voltage(s) 100 – 120 / 200 – 240 V AC (±10 %), 50/60 Hz  
Integral leak rate 1 · 10-8 Pa m3/s | 7.5 · 10-8 Torr l/s | 1 · 10-7 mbar l/s
Mains frequency compatibility 50 Hz
60 Hz
Mounting orientation 90° – 180° (HV flange bottom)
Particle intake Yes
Permissible radial magnetic field max. 6 mT
Position of power supply pack Integrated power supply pack
Power consumption max. 1350 VA
Protection degree IP54
Pumping speed for Ar 1350 l/s
Pumping speed for CF4 1100 l/s
Pumping speed for H2 1150 l/s
Pumping speed for He 1350 l/s
Pumping speed for N2 1400 l/s
Rotation speed ± 2 % 37,800 rpm | 37,800 min-1
Rotation speed variable 50 – 100 %
Run-up time 2.5 min
Sound pressure level 50 dB(A)
Type of electronic drive unit installation Integrated electronic drive unit
Venting connection G 1/8"
Weight 31.2 kg | 68.78 lb

Dimension-TIM-RS

File Type Language Date Filesize
Data sheet PDF EN 06-03-2023 ~ 552.4 KB
Stepfile STP EN 08-16-2022 ~ 8.5 MB
File Type Language Date Filesize
Operating instructions HiPace 1500 standard | C | U | UC (PT0565BEN_B) PDF EN 08-27-2021 ~ 7.5 MB
Operating instructions TC 1200 E74 Electronic Drive Unit (PT0303BEN_K) PDF EN 04-28-2023 ~ 2.7 MB
Software TurboViewer (Version 010400) ZIP EN 06-28-2018 ~ 29.9 MB
Software LabView Driver (Pfeiffer Vacuum) ZIP EN 09-20-2021 ~ 2.4 MB
Your local contact
Pfeiffer Vacuum Inc.
24 Trafalgar Square
NH 03063-1988 Nashua
USA

T  +1 (800) 248-8254
F  +1 (888) 658-7983
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