| Bearing | Hybrid |
| Compression ratio for Ar | > 1 · 1011 |
| Compression ratio for H2 | 9 · 105 |
| Compression ratio for He | > 1 · 108 |
| Compression ratio for N2 | > 1 · 1011 |
| Connection flange (in) | DN 100 CF-F |
| Connection flange (out) | DN 16 ISO-KF/G ¼" |
| Cooling method | Air |
| Current, max. | 3,8 A |
| Electronic drive unit | with TC 110 |
| Final pressure | < 5 · 10-10 hPa | < 3.75 · 10-10 Torr | < 5 · 10-10 mbar |
| Fore-vacuum max. for N2 | 11 hPa | 8.25 Torr | 11 mbar |
| Gas throughput at final rotation speed for Ar | 0.5 hPa·l/s |
| Gas throughput at final rotation speed for H2 | 5 hPa·l/s |
| Gas throughput at final rotation speed for He | 1.8 hPa·l/s |
| Gas throughput at final rotation speed for N2 | 0.9 hPa·l/s |
| I/O interfaces | RS-485, Remote |
| Integrated power supply pack | YES |
| Interfaces, extended | Profibus DeviceNet E74 |
| Mounting orientation | Arbitrary |
| Operating voltage: V DC | 24 (± 5 %) V DC |
| Permissible radial magnetic field max. | 5.5 mT |
| Power consumption max. | 100 W |
| Protection degree | IP30 |
| Pumping speed for Ar | 255 l/s |
| Pumping speed for H2 | 220 l/s |
| Pumping speed for He | 255 l/s |
| Pumping speed for N2 | 260 l/s |
| Rotation speed ± 2 % | 60,000 rpm | 60,000 min-1 |
| Run-up time | 4 min |
| Sound pressure level | ≤50 dB(A) |
| Venting connection | G 1/8" |
| Weight | 8.9 kg | 19.62 lb |
| TIC 010, adapter for two sensors | PT R70 000 |
| Y-connector M12 for RS-485 | P 4723 010 | |
| USB RS-485 converter | PM 061 207 -T | |
| Coupling M12 for RS-485 | PM 061 270 -X | |
| Terminal resistor for RS-485 | PT 348 105 -T | |
| Power separator for RS-485 | PT 348 132 -T |
| Control cable for valve | PM 061 687 -T | |
| HiPace – ACP connection cable | PM 071 142 -X |
| Mains cable 230 V AC, CEE 7/7 to C13, 3 m | P 4564 309 ZA | |
| Mains cable 115 V AC, NEMA 5-15 to C13, 3 m | P 4564 309 ZE | |
| Mains cable 208 V AC, NEMA 6-15 to C13, 3 m | P 4564 309 ZF |
| Interface cable, M12 m straight / M12 m straight, 3 m | PM 061 283 -T | |
| Interface cable, M12 m straight / M12 m angled, 0.7 m | PM 061 791 -T |
| Connection kit for mounting of pumps, DN 16 ISO-KF | 120SWS016-1000 |
| Relay box for backing pumps, single phase 20 A for TC 110/120 and TCP 350, plug M8 | PM 061 373 -T | |
| Relay box, shielded, for backing pumps, 1-phase 7A for TC 110/120 and TCP 350, plug M8 | PM 071 282 -X |
| Elastomer seal, FKM, DN 100 CF | 402DFL100-S2 |
| Elastomer seal, FKM, DN 100 CF | 402DFL100-Z |
| Copper gasket, OFHC copper, DN 100 CF | 490DFL100-S10 |
| Copper gasket, silver-plated, DN 100 CF | 490DFL100-S-S5 |
| Copper gasket, silver-plated, vacuum-annealed, DN 100 CF | 490DFL100-S-G-S5 |
| Copper gasket, vacuum-annealed, DN 100 CF | 490DFL100-G-S5 |
| Splinter shield for turbopumps, DN 100 CF-F | PM 016 315 | |
| Protection screen for DN 100 CF-F | PM 016 336 |
| Sealing gas throttle for HiPace 300 | PM Z01 317 |
| TVV 001, fore-vacuum safety valve, 230 V AC | PM Z01 205 | |
| TVV 001, fore-vacuum safety valve, 115 V AC | PM Z01 206 |
| UHV Gate valve, DN 100 CF, UNF, electro-pneumatic, PI (RS)/PV 24 V DC, SS/Cu/FKM | GVMP-S08642 |
| Sealing gas valve, shielded for HiPace 300 with TC 110/120 | PM Z01 311 |
| Shielded power failure venting unit, 24 V DC, G 1/8", for connection to TC 110/120 | PM Z01 330 |
| Venting valve, shielded, 24 V DC, G 1/8", for connection to TC 110/120 | PM Z01 290 |
| Vibration damper for HiPace 300/400, DN 100 CF-F | PM 006 488 -X |
| File | Type | Language | Date | Filesize | |
|---|---|---|---|---|---|
| Data sheet | EN | 08-18-2022 | ~ 599.5 KB | ||
| Stepfile | STP | EN | 06-23-2010 | ~ 2.2 MB | |
| T | +1 (800) 248-8254 |
| F | +1 (888) 658-7983 |
