| Actuator | Electro-pneumatic |
| Bakeout temperature: actuator | 60 °C | 140 °F | 333 K |
| Bakeout temperature: actuator, pilot valve | 60 °C | 140 °F | 333 K |
| Bakeout temperature: actuator, position indicator | 60 °C | 140 °F | 333 K |
| Bakeout temperature: housing | 200 °C | 392 °F | 473 K |
| Bakeout temperature: valve closed | 150 °C | 302 °F | 423 K |
| Bakeout temperature: valve open, under vacuum | 200 °C | 392 °F | 473 K |
| Closing/opening time | 1.5 s/1.5 s |
| Compressed air (overpressure) | 4,500-6,000 hPa | 3,375-4,500 Torr | 4,500-6,000 mbar |
| Compressed air volume | 62 cm³ |
| Conductance value with molecular flow | 524 l/s |
| Control valve | Included |
| Differential pressure in closing direction | 1,000 hPa | 750 Torr | 1,000 mbar |
| Differential pressure in opening direction | 1,000 hPa | 750 Torr | 1,000 mbar |
| Housing | 304/1.4301 Stainless steel |
| Nominal diameter | DN 63 CF |
| Number of screws | 8 Pcs. |
| Opens against differential pressure of | 30 hPa | 22.5 Torr | 30 mbar |
| Position indicator | Included |
| Power consumption | 24 V DC / 4.5 W |
| Pressure max. (absolute) | 1,000 hPa | 750 Torr | 1,000 mbar |
| Pressure min. | 1 · 10-10 hPa | 7.5 · 10-11 Torr | 1 · 10-10 mbar |
| Seal: Housing | Copper |
| Seal: Valve seat | FKM |
| Service life | 100000 cycles |
| Supply | 24 V DC |
| Thread | 5/16"-24 UNF |
| Thread depth | 16 mm | 0.63 inch |
| Tightness | 1 · 10-9 mbar l/s |
| Type | UHV gate valve |
| Valve plate | Stainless steel 304/1.4301 |
| Weight | 5 kg | 11.02 lb |
| File | Type | Language | Date | Filesize | |
|---|---|---|---|---|---|
| Data sheet | EN | 07-05-2022 | ~ 296.4 KB | ||
| T | +1 (800) 248-8254 |
| F | +1 (888) 658-7983 |
