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YE66215A
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ATH 1603 M, DN 250 ISO-F, with Integrated Drive Electronics OBC V4, DeviceNet, Water-Cooled, Non-Heated
Order number: YE66215A

  • 5-axis magnetically levitated turbopump with drag stage for a pump speed of up to 1400 l/s for N2
  • DN 250 ISO-F inlet flange
  • Operation with OBC V4 integrated drive electronics
  • Installation in any orientation
  • DeviceNet, Water cooled, Non-heated
  • CE marked and ROHS compliant
Ambient temperature 5-45 °C | 41-113 °F | 278-318 K
Bakeout temperature max. 120 °C | 248 °F | 393 K
Bearing Magnetically
Compression ratio for Ar > 1 · 108
Compression ratio for H2 > 5 · 102
Compression ratio for He > 4 · 104
Compression ratio for N2 > 1 · 108
Cooling method Water
Cooling method, standard Water
Cooling water flow 60 l/h
Cooling water flow, max 60 l/h
Cooling water flow, min 60 l/h
Cooling water temperature 15-25 °C | 59-77 °F | 288-298 K
Flange (in) DN 250 ISO-F
Flange (out) DN 40 ISO-KF
Fore-vacuum max. for Ar 2.5 hPa | 1.88 Torr | 2.5 mbar
Fore-vacuum max. for H2 0.3 hPa | 0.23 Torr | 0.3 mbar
Fore-vacuum max. for He 1.2 hPa | 0.9 Torr | 1.2 mbar
Fore-vacuum max. for N2 1.7 hPa | 1.27 Torr | 1.7 mbar
Gas throughput for Ar 20.3 hPa·l/s
Gas throughput for H2 > 67.6 hPa·l/s
Gas throughput for He > 67.6 hPa·l/s
Gas throughput for N2 67.6 hPa·l/s
I/O interfaces DeviceNet
Integrated power supply YES
Leak rate < 5 · 10-8 hPa·l/s
Mains requirement 200 – 240 (±10%) V AC 50/60 Hz
Mounting orientation Any
Noise level < 48 dB(A)
Operating site Indoor
Operating voltage: 50/60 Hz 200 – 240 / 200 – 240, 50/60 Hz V AC
Power consumption at ultimate pressure 300 W
Power consumption max. 650 W
Protection category IP42
Pumping speed for Ar 1350 l/s
Pumping speed for H2 540 l/s
Pumping speed for He 970 l/s
Pumping speed for N2 1400 l/s
Rotation speed ± 2 % 39,000 rpm | 39,000 min-1
Rotation speed at stand-by 15,000-39,000 rpm | 15,000-39,000 min-1
Run-up time < 6 min
Sound pressure level <48 dB(A)
Typical vibration displacement (at inlet flange 10-1000 Hz) 0.01 µm
Ultimate pressure < 6 · 10-9 hPa | < 4.5 · 10-9 Torr | < 6 · 10-9 mbar
Ultimate pressure without gas ballast < 6 · 10-9 hPa | < 4.5 · 10-9 Torr | < 6 · 10-9 mbar
Weight 42 kg | 92.59 lb

Dimension-TIM-RS

H
317.2 mm

Characteristic-TIM-RS-1

Characteristic-TIM-RS-2

File Type Language Date Filesize
Data sheet PDF EN 12-07-2019 ~ 626.3 KB
File Type Language Date Filesize
Operating instructions ATH 1603 M - 2303 M (115101OEN_05) PDF EN 06-12-2018 ~ 2.8 MB
Your local contact
Pfeiffer Vacuum Inc.
24 Trafalgar Square
NH 03063-1988 Nashua
USA

+1 (800) 248-8254
+1 (888) 658-7983
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