ATH 160x M

5-axis magnetically levitated turbopump with drag stage for a pump speed of up to 1400 l/s for N₂

Product description

• Operation with integrated OBC electronic drive unit or external Magpower electronic drive unit
• Installation in any orientation
• Water cooled
• CE marked and ROHS compliant
• Heated version (MT) available for corrosive applications
• ATH-M is compact turbomolecular pumps in world reference in semiconductor and coating industry. World wide large installation base in light process to harsh process for DN200 and DN250 flange size

Product

• ATH 1600 MT, DN 200 CF-F, external drive electronics, water-cooled, heated (P6523103)
• ATH 1600 MT, DN 200 ISO-F, external drive electronics, water-cooled, heated (P6563103)
• ATH 1600 MT, DN 250 CF-F, external drive electronics, water-cooled, heated (P6623103)
• ATH 1600 MT, DN 250 ISO-F, external drive electronics, water-cooled, heated (P6663103)
• ATH 1603 M, DN 200 CF-F, External drive electronics, water-cooled, non-heated (Y2522100)
• ATH 1603 M, DN 200 ISO-F, External drive electronics, Water cooled, Non-heated (Y2562100)
• ATH 1603 M, DN 250 CF-F, External drive electronics, Water cooled, Non-heated (Y2622100)
• ATH 1603 M, DN 250 ISO-F, External drive electronics, Water cooled, Non-heated (Y2662100)
• ATH 1603 M, DN 200 CF-F, OBC V4 integrated drive electronics, remote, water-cooled, non-heated (YC52215A)
• ATH 1603 M, DN 200 ISO-F, with integrated drive electronics OBC V4, remote, water-cooled, non-heated (YC56215A)
• ATH 1603 M, DN 250 CF-F, OBC V4 integrated drive electronics, remote, water-cooled, non-heated (YC62215A)
• ATH 1603 M, DN 250 ISO-F, with integrated drive electronics OBC V4, remote, water-cooled, non-heated (YC66215A)
• ATH 1603 M, DN 200 CF-F, with integrated drive electronics OBC V4, Profibus, water-cooled, non-heated (YG52215A)
• ATH 1603 M, DN 200 ISO-F, with integrated drive electronics OBC V4, Profibus, water-cooled, non-heated (YG56215A)
• ATH 1603 M, DN 250 CF-F, with integrated drive electronics OBC V4, Profibus, water-cooled, non-heated (YG62215A)
• ATH 1603 M, DN 250 ISO-F, OBC V4 integrated drive electronics, Profibus, water cooled, non-heated (YG66215A)