ATH 160x M

5-axis magnetically levitated turbopump with drag stage for a pump speed of up to 1400 l/s for N₂

Product description

• Operation with integrated OBC electronic drive unit or external Magpower electronic drive unit
• Installation in any orientation
• Water cooled
• CE marked and ROHS compliant
• Heated version (MT) available for corrosive applications
• ATH-M is compact turbomolecular pumps in world reference in semiconductor and coating industry. World wide large installation base in light process to harsh process for DN 200 and DN 250 flange size

Product

• ATH 1600 MT, DN 200 CF-F, external drive electronics, water-cooled, heated (P6523103)
• ATH 1600 MT, DN 200 ISO-F, external drive electronics, water-cooled, heated (P6563103)
• ATH 1600 MT, DN 250 CF-F, external drive electronics, water-cooled, heated (P6623103)
• ATH 1600 MT, DN 250 ISO-F, external drive electronics, water-cooled, heated (P6663103)
• ATH 1603 M, DN 200 CF-F, External drive electronics, water-cooled, non-heated (Y2522100)
• ATH 1603 M, DN 200 ISO-F, External drive electronics, Water cooled, Non-heated (Y2562100)
• ATH 1603 M, DN 250 CF-F, External drive electronics, Water cooled, Non-heated (Y2622100)
• ATH 1603 M, DN 250 ISO-F, External drive electronics, Water cooled, Non-heated (Y2662100)
• ATH 1603 M, DN 200 CF-F, OBC V4 integrated drive electronics, remote, water-cooled, non-heated (YC52215A)
• ATH 1603 M, DN 200 ISO-F, with integrated drive electronics OBC V4, remote, water-cooled, non-heated (YC56215A)
• ATH 1603 M, DN 250 CF-F, OBC V4 integrated drive electronics, remote, water-cooled, non-heated (YC62215A)
• ATH 1603 M, DN 250 ISO-F, with integrated drive electronics OBC V4, remote, water-cooled, non-heated (YC66215A)
• ATH 1603 M, DN 200 CF-F, with integrated drive electronics OBC V4, Profibus, water-cooled, non-heated (YG52215A)
• ATH 1603 M, DN 200 ISO-F, with integrated drive electronics OBC V4, Profibus, water-cooled, non-heated (YG56215A)
• ATH 1603 M, DN 250 CF-F, with integrated drive electronics OBC V4, Profibus, water-cooled, non-heated (YG62215A)
• ATH 1603 M, DN 250 ISO-F, OBC V4 integrated drive electronics, Profibus, water cooled, non-heated (YG66215A)