ATH 160x M

5-axis magnetically levitated turbopump with drag stage for a pump speed of up to 1400 l/s for N2

Product description

  • Operation with integrated OBC electronic drive unit or external Magpower electronic drive unit
  • Installation in any orientation
  • Water cooled
  • CE marked and ROHS compliant
  • Heated version (MT) available for corrosive applications
  • ATH-M is compact turbomolecular pumps in world reference in semiconductor and coating industry. World wide large installation base in light process to harsh process for DN 200 and DN 250 flange size


Your local contact
Pfeiffer Vacuum Inc.
24 Trafalgar Square
NH 03063-1988 Nashua

+1 (800) 248-8254
+1 (888) 658-7983
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