Select & Request Contact now
  1. Home
  2. Products
  3. Vacuum Generation
  4. Turbopumps
  5. Magnetically Levitated
  6. ATH 160x M
  7. ATH 1603 M, DN 200 CF-F, with integrated drive electronics OBC V4, Profibus, water-cooled, non-heated

QR-Code

YG52215A
Similar Image

ATH 1603 M, DN 200 CF-F, with integrated drive electronics OBC V4, Profibus, water-cooled, non-heated
Order number: YG52215A

  • 5-axis magnetically levitated turbopump with drag stage for a pump speed of up to 1360 l/s for N2
  • DN 200 CF-F flange for demanding UHV applications
  • Operation with OBC V4 integrated drive electronics
  • Installation in any orientation
  • Profibus, Water cooled, Non-heated
  • CE marked and ROHS compliant
Ambient temperature 5-45 °C | 41-113 °F | 278-318 K
Bakeout temperature max. ≤ 120 °C | ≤ 248 °F | ≤ 393 K
Bearing Magnet
Compression ratio for Ar > 1 · 108
Compression ratio for H2 > 5 · 102
Compression ratio for He > 4 · 104
Compression ratio for N2 > 1 · 108
Connection flange (in) DN 200 CF-F
Connection flange (out) DN 40 ISO-KF
Cooling method Water
Cooling water flow 60 l/h
Cooling water temperature 15-25 °C | 59-77 °F | 288-298 K
Electronic drive unit Magpower
OBC V4
Final pressure < 6 · 10-9 hPa | < 4.5 · 10-9 Torr | < 6 · 10-9 mbar
Fore-vacuum max. for Ar 2.5 hPa | 1.88 Torr | 2.5 mbar
Fore-vacuum max. for H2 0.3 hPa | 0.23 Torr | 0.3 mbar
Fore-vacuum max. for He 1.2 hPa | 0.9 Torr | 1.2 mbar
Fore-vacuum max. for N2 1.7 hPa | 1.27 Torr | 1.7 mbar
Gas throughput for Ar 20.3 hPa·l/s
Gas throughput for H2 > 67.6 hPa·l/s
Gas throughput for He > 67.6 hPa·l/s
Gas throughput for N2 67.6 hPa·l/s
I/O interfaces Profibus
Input voltage(s) 200 – 240 V AC (±10 %), 50/60 Hz  
Integral leak rate < 5 · 10-8 hPa·l/s
Mains frequency compatibility 50 Hz
60 Hz
Mounting orientation Arbitrary
Operating site Indoor, weatherproof
Position of power supply pack Integrated power supply pack
Power consumption at final pressure 300 W
Power consumption max. 650 W
Protection degree IP42
Pumping speed for Ar 1280 l/s
Pumping speed for H2 540 l/s
Pumping speed for He 940 l/s
Pumping speed for N2 1360 l/s
Rotation speed ± 2 % 39,000 rpm | 39,000 min-1
Rotation speed in stand-by mode 15,000-39,000 rpm | 15,000-39,000 min-1
Run-up time < 6 min
Sealing gas connection DN 16 ISO-KF
Sound pressure level <48 dB(A)
Type of electronic drive unit installation Integrated electronic drive unit
Typical oscillation train (at inlet flange 10-1000 Hz) 0.01 µm
Weight 42 kg | 92.59 lb

Dimension-TIM-RS

H
327.5 mm

Characteristic-TIM-RS-1

Characteristic-TIM-RS-2

File Type Language Date Filesize
Data sheet PDF EN 09-30-2023 ~ 707.5 KB
File Type Language Date Filesize
Operating instructions ATH 1603 / 2303 M (115101OEN_08) PDF EN 04-22-2022 ~ 7.7 MB
Your local contact
Pfeiffer Vacuum Inc.
24 Trafalgar Square
NH 03063-1988 Nashua
USA

T  +1 (800) 248-8254
F  +1 (888) 658-7983
write message