| Ambient temperature | 5-45 °C | 41-113 °F | 278-318 K |
| Bakeout temperature max. | ≤ 120 °C | ≤ 248 °F | ≤ 393 K |
| Bearing | Magnet |
| Compression ratio for Ar | > 1 · 108 |
| Compression ratio for H2 | > 5 · 102 |
| Compression ratio for He | > 4 · 104 |
| Compression ratio for N2 | > 1 · 108 |
| Connection flange (in) | DN 250 CF-F |
| Connection flange (out) | DN 40 ISO-KF |
| Cooling method | Water |
| Cooling water flow | 60 l/h |
| Cooling water temperature | 15-25 °C | 59-77 °F | 288-298 K |
| Electronic drive unit | Magpower OBC V4 |
| Final pressure | < 6 · 10-9 hPa | < 4.5 · 10-9 Torr | < 6 · 10-9 mbar |
| Fore-vacuum max. for Ar | 2.5 hPa | 1.88 Torr | 2.5 mbar |
| Fore-vacuum max. for H2 | 0.3 hPa | 0.23 Torr | 0.3 mbar |
| Fore-vacuum max. for He | 1.2 hPa | 0.9 Torr | 1.2 mbar |
| Fore-vacuum max. for N2 | 1.7 hPa | 1.27 Torr | 1.7 mbar |
| Gas throughput for Ar | 20.3 hPa·l/s |
| Gas throughput for H2 | > 67.6 hPa·l/s |
| Gas throughput for He | > 67.6 hPa·l/s |
| Gas throughput for N2 | 67.6 hPa·l/s |
| I/O interfaces | Remote |
| Input voltage(s) | 200 – 240 V AC (±10 %), 50/60 Hz |
| Integral leak rate | < 5 · 10-8 hPa·l/s |
| Mains frequency compatibility | 50 Hz 60 Hz |
| Mounting orientation | Arbitrary |
| Operating site | Indoor, weatherproof |
| Position of power supply pack | Integrated power supply pack |
| Power consumption at final pressure | 300 W |
| Power consumption max. | 650 W |
| Protection degree | IP42 |
| Pumping speed for Ar | 1350 l/s |
| Pumping speed for H2 | 540 l/s |
| Pumping speed for He | 970 l/s |
| Pumping speed for N2 | 1400 l/s |
| Rotation speed ± 2 % | 39,000 rpm | 39,000 min-1 |
| Rotation speed in stand-by mode | 15,000-39,000 rpm | 15,000-39,000 min-1 |
| Run-up time | < 6 min |
| Sealing gas connection | DN 16 ISO-KF |
| Sound pressure level | <48 dB(A) |
| Type of electronic drive unit installation | Integrated electronic drive unit |
| Typical oscillation train (at inlet flange 10-1000 Hz) | 0.01 µm |
| Weight | 42 kg | 92.59 lb |
| Connection kit for mounting pumps, DN 40 ISO-KF | 120SWS040-1000 |
| Hand held remote (HHR) with cable | 114461 |
| Rotatable flange DN 250 CF-F | 303133 |
| OmniControl 200 mit PKR 361, 40 CF | PT 440 957 -T |
| Screw set for CF-F (for ATH 1600 M, DN 250) | 111665 |
| Dust filter | 106229 |
| Stainless inlet filter for DN 250 - M 5 | 108762 | |
| Aluminum inlet filter for DN 250 | 111640 |
| UHV gate valve, DN 250 CF, UNF, electro-pneumatic, PI (RS)/PV 24 V DC, SS/Cu/FKM | GVMP-S12642 |
| Sealing gas valve, 50 sccm | 111921S |
| Water inlet valve 24 V DC | 108668 |
| Air venting valve (for OBC V4 and Magpower) | 114280 |
| File | Type | Language | Date | Filesize | |
|---|---|---|---|---|---|
| Data sheet | EN | 09-28-2023 | ~ 627.5 KB | ||
| File | Type | Language | Date | Filesize | |
|---|---|---|---|---|---|
| Operating instructions ATH 1603 / 2303 M (115101OEN_08) | EN | 04-22-2022 | ~ 7.7 MB | ||
| T | +1 (800) 248-8254 |
| F | +1 (888) 658-7983 |
