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P6563103
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ATH 1600 MT, DN 200 ISO-F, external drive electronics, water-cooled, heated
Order number: P6563103

  • 5-axis magnetically levitated turbopump with drag stage for a pump speed of up to 1360 l/s for N2
  • DN 200 ISO-F inlet flange
  • Operation with external Magpower electronic drive unit
  • Installation in any orientation
  • Water cooled, Heated
  • CE marked and ROHS compliant
Bearing Magnet
Compression ratio for Ar > 1 · 108
Compression ratio for H2 > 5 · 102
Compression ratio for He > 4 · 103
Compression ratio for N2 > 1 · 108
Connection flange (in) DN 200 ISO-F
Connection flange (out) DN 40 ISO-KF
Cooling method Water
Cooling water flow 60 l/h
Cooling water temperature 15-25 °C | 59-77 °F | 288-298 K
Corrosive gas version Yes
Final pressure < 6 · 10-9 hPa | < 4.5 · 10-9 Torr | < 6 · 10-9 mbar
Fore-vacuum max. for N2 2.2 hPa | 1.65 Torr | 2.2 mbar
Gas throughput at maximum rotation speed for Ar, heated pump at 75 °C 8.5 hPa·l/s
Gas throughput at maximum rotation speed for H2, heated pump at 75 °C > 16.9 hPa·l/s
Gas throughput at maximum rotation speed for N2, heated pump at 75 °C 16.9 hPa·l/s
Gas throughput for Ar 20.3 hPa·l/s
Gas throughput for H2 > 67.6 hPa·l/s
Gas throughput for He > 67.6 hPa·l/s
Gas throughput for N2 67.6 hPa·l/s
I/O interfaces Via external drive electronics
Input voltage(s) 200 – 240 V AC, 50/60 Hz  
Mains frequency compatibility 50 Hz
60 Hz
Mounting orientation Arbitrary
Particle intake Yes
Position of power supply pack External power supply pack
Power consumption at final pressure 300 W
Power consumption max. 650 W
Pumping speed for Ar 1280 l/s
Pumping speed for H2 540 l/s
Pumping speed for He 940 l/s
Pumping speed for N2 1360 l/s
Rotation speed ± 2 % 39,000 rpm | 39,000 min-1
Run-up time < 6 min
Sound pressure level ≤48 dB(A)
Type of electronic drive unit installation External electronic drive unit -not incl.-
Weight 34 kg | 74.96 lb

Dimension-TIM-RS

H
316.9 mm

Characteristic-TIM-RS-1

Characteristic-TIM-RS-2

File Type Language Date Filesize
Data sheet PDF EN 09-30-2023 ~ 643.5 KB
Your local contact
Pfeiffer Vacuum Inc.
24 Trafalgar Square
NH 03063-1988 Nashua
USA

T  +1 (800) 248-8254
F  +1 (888) 658-7983
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