ATH 230x M
5-axis magnetically levitated turbopump with drag stage for a pump speed of up to 2150 l/s for N2
Product description
- Operation with integrated OBC electronic drive unit or external Magpower electronic drive unit
- Installation in any orientation
- Water cooled
- CE marked and ROHS compliant
- Heated version (MT) available for corrosive applications.
- ATH-M mid size turbomolecular pump in world reference in semiconductor and coating industry. World wide large installation base in light process to harsh process for DN 200 and DN 250 flange size
Product
- ATH 2300 MT, DN 250 CF-F, external drive electronics, water-cooled, heated (Q6622100)
- ATH 2300 MT, DN 250 ISO-F, external drive electronics, water-cooled, heated (Q6662100)
- ATH 2303 M, DN 250 ISO-F, with integrated drive electronics OBC V4, remote, water-cooled, non-heated (TMBBA662405A)
- ATH 2303 M, DN 250 ISO-F, with integrated drive electronics OBC V4, Profibus, water-cooled, non-heated (TMBBB662405A)
