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Q6662100
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ATH 2300 MT, DN 250 ISO-F, external drive electronics, water-cooled, heated
Order number: Q6662100

  • 5-axis magnetically levitated turbopump with drag stage for a pump speed of up to 2150 l/s for N2
  • DN 250 ISO-F inlet flange
  • Operation with Magpower external drive electronics
  • Installation in any orientation
  • Water cooled, Heated
  • CE marked and ROHS compliant
Bearing Magnet
Compression ratio for Ar > 1 · 108
Compression ratio for H2 > 2 · 103
Compression ratio for He > 3 · 104
Compression ratio for N2 > 1 · 108
Connection flange (in) DN 250 ISO-F
Connection flange (out) DN 40 ISO-KF
Cooling method Water
Cooling water flow 60 l/h
Cooling water flow, max. 60 l/h
Cooling water flow, min. 60 l/h
Cooling water temperature 15-25 °C | 59-77 °F | 288-298 K
Corrosive gas version Yes
Final pressure < 6 · 10-9 hPa | < 4.5 · 10-9 Torr | < 6 · 10-9 mbar
Fore-vacuum max. for N2 2.8 hPa | 2.1 Torr | 2.8 mbar
Gas throughput at maximum rotation speed for Ar, heated pump at 75 °C 8.5 hPa·l/s
Gas throughput at maximum rotation speed for H2, heated pump at 75 °C > 16.9 hPa·l/s
Gas throughput at maximum rotation speed for N2, heated pump at 75 °C 16.9 hPa·l/s
Gas throughput for Ar 25.4 hPa·l/s
Gas throughput for H2 > 67.6 hPa·l/s
Gas throughput for He > 67.6 hPa·l/s
Gas throughput for N2 67.6 hPa·l/s
I/O interfaces Via External drive electronics
Mains frequency compatibility 50 Hz
60 Hz
Mounting orientation Arbitrary
Operating voltage: 50/60 Hz 200 – 240, 50/60 Hz V AC
Particle intake Yes
Power consumption at final pressure 350 W
Power consumption max. 1000 W
Pumping speed for Ar 2000 l/s
Pumping speed for H2 1100 l/s
Pumping speed for He 1800 l/s
Pumping speed for N2 2150 l/s
Rotation speed ± 2 % 31,000 rpm | 31,000 min-1
Run-up time < 8 min
Sound pressure level ≤ 47 dB(A)
Type of electronic drive unit installation External electronic drive unit -not incl.-
Weight 60 kg | 132.28 lb

Dimension-TIM-RS

H
358.5 mm

Characteristic-TIM-RS-1

Characteristic-TIM-RS-2

File Type Language Date Filesize
Data sheet PDF EN 05-30-2023 ~ 682.2 KB
File Type Language Date Filesize
Operating instructions ATH 2300 M_MT (108895OEN_07) PDF EN 04-22-2022 ~ 2.7 MB
Your local contact
Pfeiffer Vacuum Inc.
24 Trafalgar Square
NH 03063-1988 Nashua
USA

T  +1 (800) 248-8254
F  +1 (888) 658-7983
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