ATH 3204 M

5-axis magnetically levitated turbopump with drag stage for a pump speed of up to 3050 l/s for N₂

Product description

• Operation with integrated drive electronics
• Installation in any orientation
• Water cooled
• CE marked and ROHS compliant
• Heated version (MT) available for corrosive applications
• ATH-M large size turbomolecular pump has been introduced for silicon based industry applications, based on long experience for DN 320 flange size

Product

• ATH 3204 M, DN 320 ISO-F, water-cooled, non-heated, with integrated drive electronics (TMAAAC64015A)
• ATH 3204 MT, DN 320 ISO-F, water-cooled, heated, with integrated drive electronics (TMAAAC681101)