ATH 3204 M
5-axis magnetically levitated turbopump with drag stage for a pump speed of up to 3050 l/s for N2
- Integrated drive electronics
- Installation in any orientation
- Water cooled
- CE marked and ROHS compliant
- Heated version (MT) available for corrosive applications.
- ATH-M large size turbomolecular pump has been introduced for silicon based industry applications, based on long experience for DN320 flange size.