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VY362100
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ATH 500 M, DN 100 ISO-F, Profibus, water-cooled, non-heated
Order number: VY362100

  • 5-axis magnetically levitated turbopump with drag stage for a pump speed of up to 350 l/s for N2
  • DN 100 ISO-F inlet flange
  • Compact integrated drive electronics
  • Installation in any orientation
  • Profibus, Water cooled, Non-heated
  • CE marked and ROHS compliant
Bearing Magnet
Compression ratio for Ar > 8 · 106
Compression ratio for H2 > 2 · 102
Compression ratio for He > 1 · 104
Compression ratio for N2 > 2 · 107
Connection flange (in) DN 100 ISO-F
Connection flange (out) DN 25 ISO-KF
Cooling method Water
Cooling water flow 60 l/h
Cooling water flow, max. 60 l/h
Cooling water flow, min. 60 l/h
Cooling water temperature 15-25 °C | 59-77 °F | 288-298 K
Final pressure < 1 · 10-8 hPa | < 7.5 · 10-9 Torr | < 1 · 10-8 mbar
Fore-vacuum max. for N2 2.6 hPa | 1.95 Torr | 2.6 mbar
Gas throughput for Ar 42.3 hPa·l/s
Gas throughput for H2 > 169 hPa·l/s
Gas throughput for He > 169 hPa·l/s
Gas throughput for N2 67.6 hPa·l/s
I/O interfaces Profibus
Input voltage(s) 48 V DC (±5 %)  
Mains frequency compatibility 50 Hz
60 Hz
Mounting orientation Arbitrary
Power consumption at final pressure 100 W
Power consumption max. 560 W
Pumping speed for Ar 320 l/s
Pumping speed for H2 170 l/s
Pumping speed for He 310 l/s
Pumping speed for N2 350 l/s
Rotation speed ± 2 % 50,000 rpm | 50,000 min-1
Run-up time < 2 min
Sound pressure level ≤ 42 dB(A)
Type of electronic drive unit installation Integrated electronic drive unit
Weight 17 kg | 37.48 lb

Dimension-TIM-RS

H
294.5 mm

Characteristic-TIM-RS-1

Characteristic-TIM-RS-2

File Type Language Date Filesize
Data sheet PDF EN 06-03-2023 ~ 614.1 KB
File Type Language Date Filesize
Operating instructions ATH 500 M (114436OEN_08) PDF EN 07-12-2021 ~ 6.9 MB
Your local contact
Pfeiffer Vacuum Inc.
24 Trafalgar Square
NH 03063-1988 Nashua
USA

T  +1 (800) 248-8254
F  +1 (888) 658-7983
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