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Semiconductor Fab in 3D

Semiconductor fab in 3D

The solutions from Pfeiffer Vacuum in 3D

Semiconductor fabrication takes place under clean-room conditions in the high and ultra-high vacuum range. In order to implement and guarantee such conditions, reliable vacuum equipment of premium quality is a must.

A typical semiconductor fab consists of four levels. At the top level, the cleanroom, the production line as well as special systems for contamination management are located. The level below the cleanroom – the so-called “subfloor” – is where the dry pumps for the evacuation of load-locks and transfer chambers are located. The next level below is where the cooling units, current supplies and RF-generators of the plant are located. The lowest level contains dry pumps and the exhaust gas treatment (abatement) equipment.

Explore our solutions for semiconductor fabs – in 3D and from a 360° perspective! Click through the different floors and components of our semiconductor fab model and learn which products Pfeiffer Vacuum offers to fulfill the diverse requirements!

Functional principle of the HiPace turbopump

Functional principle of the HiPace turbopump in 3D

Take a look inside the turbopump

Up to 90,000 rotations per minute, almost speed of sound at the outer radius, vacuum conditions of up to 10 -11 mbar — our turbopumps convince with their performance and reliability.

Accompany the gas molecules on their journey through the turbopump in 3D and learn the functional principle as well as the design of the HiPace from Pfeiffer Vacuum!

High performance Roots pump HiLobe

High performance HiLobe Roots pumps in 3D

New high performance Roots pump HiLobe in 3D

These innovative Roots pumps offer a nominal pumping speed range of 520 - 2,100 m3/h and can be perfectly adjusted to customer-specific requirements.

Functional principle of the OktaLine Roots pump

View inside the OktaLine from Pfeiffer Vacuum

Functional principle of the Okta Line Roots in 3D

Take a look inside the Roots pump from Pfeiffer Vacuum! Learn about the pump components in this 3D sectional model and follow the gas molecules on their way through the OktaLine.

Explore the functional principle and the Roots design.

Functional principle of the A4 multi-stage Roots pump

3D view inside the A4 series

Design and function of the multi-stage Roots pumps from Pfeiffer Vacuum

The processes in the semiconductor industry always provide new challenges for the installed vacuum pumps. The A4 series is based on the proven, energy-efficient multi-stage Roots technology from Pfeiffer Vacuum.

Take a look at what happens inside the pump and follow the gas molecules on their way!

ISO-KF flange system in 3D

ISO-KF flange system from Pfeiffer Vacuum in 3D

Pfeiffer Vacuum manufactures the ISO-KF flange system according to DIN 28403 and ISO 2861.

Explore the designs, the components as well as the functional principle of the ISO-KF flange systems from Pfeiffer Vacuum in a 3D perspective!

Diaphragm pump MVP from Pfeiffer Vacuum in 3D

The MVP diaphragm pump in 3D

Compact design, easy integration into existing systems – the diaphragm pumps from Pfeiffer Vacuum convince with their small footprint. Explore the pump from inside in 3D, learn more about its components and its function!

Rotary vane pump of the DuoLine in 3D

Take a look inside the DuoLine

Rotary vane pump in 3D

Light, compact, powerful – the rotary vane pumps of the DuoLine from Pfeiffer Vacuum are the smallest in their pumping speed spectrum on the market.

Explore the design of the pumps and follow the molecules on their way in 3D!

ISO-K and ISO-F flange systems

ISO-K and ISO-F flange systems

Experience the design, components and functional principle of ISO-K and ISO-F flange systems from Pfeiffer Vacuum in 3D!

PrismaPro quadrupole mass spectrometer in 3D

Functional principle of the PrismaPro quadrupole mass spectrometer

Experience the function and design of the PrismaPro quadrupole mass spectrometer with Faraday and C-SEM detector from Pfeiffer Vacuum. Follow the molecules on their way through the analyzer of the PrismaPro and learn how residual gas analysis is performed in high vacuum!

New leak detectors ASM 390 and ASM 392 in 3D!

Leak detectors ASM 390 and ASM 392 in 3D

Rapid pump down time, high sensitivity, accurate results and minimal detection time: The ASM 390 and ASM 392 are the perfect solution for the semiconductor and the display industries as well as for other demanding applications.

A frictionless backing pump, a powerful high vacuum pump – they are ideal for leak testing in clean environments.

Speed up your leak detection process to reduce the downtime of your production equipment with the ASM 392 – it comes with an additional turbopump!

Integral test of parts under vacuum in helium

Leak detection methods — part 1: Integral test of parts under vacuum in helium

Experience our new 3D series on the different leak detection methods and select the matching method for your application!

From leak localization over integral testing to sniffing and bombing testing — you get to know all about the testing processes. Part 1 shows the integral test of parts under vacuum enclosed in a defined helium atmosphere.

Sniffing test

Leak detection methods - part 2: Sniffing test

Experience our new 3D series on the different leak detection methods and select the matching method for your application!

From leak localization over integral testing to sniffing and bombing testing — you get to know all about the testing processes. Part 2 shows the sniffing test.

Integral test of helium filled parts in vacuum

Leak detection methods — part 3: Integral test of helium filled parts in vacuum

Experience our new 3D series on the different leak detection methods and select the matching method for your application!

From leak localization over integral testing to sniffing and bombing testing — you get to know all about the testing processes. Part 3 shows the integral test of helium filled parts in a vacuum chamber.

Integral test at atmospheric pressure

Leak detection methods — part 4: Integral test at atmospheric pressure

Experience our new 3D series on the different leak detection methods and select the matching method for your application!

From leak localization over integral testing to sniffing and bombing testing — you get to know all about the testing processes. Part 4 shows the integral test at atmospheric pressure.

Spraying test

Leak detection methods — part 5: Spraying test

Experience our new 3D series on the different leak detection methods and select the matching method for your application!

From leak localization over integral testing to sniffing and bombing testing — you get to know all about the testing processes. Part 5 shows the spraying test.

Bombing test

Leak detection methods — part 6: Bombing test

Experience our new 3D series on the different leak detection methods and select the matching method for your application!

From leak localization over integral testing to sniffing and bombing testing — you get to know all about the testing processes. Part 6 shows the bombing test.

Micro-Flow -overpressure test-

Leak detection methods — part 7: Micro-Flow (overpressure test)

Experience our new 3D series on the different leak detection methods and select the matching method for your application!

From leak localization over integral testing to sniffing and bombing testing — you get to know all about the testing processes. Part 7 shows the Micro-Flow (overpressure test).

Mass extraction -vacuum test-

Leak detection methods — part 8: Mass Extraction (vacuum test)

Experience our new 3D series on the different leak detection methods and select the matching method for your application!

From leak localization over integral testing to sniffing and bombing testing — you get to know all about the testing processes.Part 8 shows the mass extraction (vacuum test).

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