HiScroll with intelligent AccessLink accessory interface

HiScroll with intelligent AccessLink accessory interface

More convenience and safety in operation

The HiScroll's new intelligent AccessLink accessory interface enables the use of a wide range of optional accessories. The HiScroll electronics now automatically recognize the connected accessories - for more convenience and safety when operating the pump.

Special process requirements are detected fully automatically by a new gas ballast valve. The HiScroll controls the valve either over a specific time interval or depending on the inlet pressure in combination with the RPT 010 sensor, which can be optionally integrated into the pump.

In addition, operational safety is increased by new vacuum safety valves. The valves prevent a pressure rise at the vacuum flange when the pump is switched off. This significantly increases operational reliability, particularly in the event of power failures.

Fully automatic pressure control is handled by the RPT 010 gauge optionally integrated in the HiScroll. This minimizes wear in the pump, extends maintenance cycles, and reduces the HiScroll's power consumption and carbon footprint.

SmartVane rotary vane pumps

SmartVane Rotary Vane Pumps

Discover the new SmartVane – the revolutionary, hermetically sealed vacuum pump by Pfeiffer Vacuum! The single-stage oil-sealed rotary vane pump has no shaft seals and, thus, eliminates the number one source of oil leaks. With its revolutionary design, it offers multiple benefits to its users: The SmartVane requires significantly less maintenance than other rotary vane pumps, has a low noise level, and allows uncomplicated installation in the existing installation space.

 

ASM 2000 – A High Sensitivity Solution for Pharma CCIT

ASM 2000 – A High Sensitivity Solution for Pharma CCIT

The ASM 2000 is a comprehensive solution completely adapted to the needs of pharma customers. Based on a helium mass spectrometer leak detector, it also includes the helium handling as well as the charging module, and can be equipped with custom fixtures for the particular containers to be tested. The instrument is calibrated against NIST1-traceable standard leaks.

1 US National Institute of Standards and Technology

 

Multi-stage Roots Pumps ACP 90

Multi-stage Roots Pumps ACP 90

The ACP 90 are new multi-stage Roots pumps, which are designed for oil- and particle free applications in the pressure range between atmosphere up to 3x10-2 hPa. These vacuum pumps meet the requirements where clean and dry vacuum is needed like drying, sterilization, coating as well as semiconductor and R&D applications. With their unique design, these pumps are robust and can withstand frequent pump downs.

 

Expansion of the OktaLine® ATEX Series of Explosion-proof Roots Pumps

Explosion-proof Roots Pumps Okta 5400 ATEX / 8100 ATEX

Roots pumps from Pfeiffer Vacuum’s OktaLine are ideal for use in processes in potentially explosive environments or for evacuating explosive gases. Designed in accordance with the ATEX Directive (2014/34/EU1 and/or 1999/92/EC) with pressure surge resistance of PN 16, they meet the very highest explosion protection requirements. Zone entrainment of explosive gases is ruled out as a result. Potential applications range from the chemical, biotechnology and pharmaceutical industries to industrial applications such as vacuum furnaces or heat treatment.

 

AMI 1000 – An Innovative CCIT Solution for the Pharmaceutical Industry

AMI 1000 – An Innovative CCIT Solution for the Pharmaceutical Industry

With the AMI 1000, the products can be sampled directly from the production line and loaded in the test chamber without any specific conditioning. At the end of the test sequence, the result is clearly displayed and a PDF report is automatically generated at the batch closure. Full automation of the test cycle including loading/unloading of the samples can be easily implemented for in-line tests.

 

The new OmniControl® universal control unit for pumps and measurement instruments

The new OmniControl® universal control unit for pumps and measurement instruments

The new OmniControl unit allows the comprehensive control of a complete vacuum system using just one device. It combines the control of the total pressure with the control of the pumps. The unit communicates with products that support the Pfeiffer Vacuum RS-485 protocol (e.g. HiPace, HiScroll, HiLobe, MVP and DigiLine). This makes it possible to exchange and process data between various Pfeiffer Vacuum products without any difficulty and without having to invest in additional devices. Optional gauges from the ActiveLine range (with analog output) can also be connected. The 3.5" touch screen with an intuitive user interface ensures easy and convenient control of the vacuum system. For example, a button for switching the devices on and off can be added. The total pressure and the pump parameters (RPM, power input etc.) can be displayed at the same time.

Turbopumps HiPace 80 Neo

Turbopumps HiPace 80 Neo

Reliable and low-vibration HiPace 80 Neo turbopump

The hybrid bearing of the HiPace 80 Neo consists of an oil-lubricated, ceramic ball bearing on the fore-vacuum side and a permanent-magnet radial bearing on the high-vacuum side. As a result, this turbopump from the HiPace series has a particularly robust bearing that ensures excellent reliability.

 

AMPC - Ambient Multi Port Controlling

(AMPC - Ambient Multi Port Controlling

The AMPC is the ideal solution for clean room and equipment front end modules monitoring (EFEM).

Airborne molecular contamination (AMC) in IC fabs is known as the major factor of yield loss. To control and understand where contamination comes from, Pfeiffer Vacuum now brings a unique solution to the semiconductor market to monitor clean rooms as well as EFEM (Equipment Front End Module).

 
 

Rotary vane pumps HenaLine

Rotary vane pumps HenaLine

Complete range of single-stage rotary vane pumps in various designs for low and medium vacuum applications

The HenaLine is a complete series of oil-sealed rotary vane pumps that are suitable for industrial applications, coating as well as for Research & Development. The exhaust air remains clean and oil-free thanks to the built-in oil mist separator. The HenaLine pumps are available with a pumping speed of 25 to 760 m3/h.

 
 

XN series - Multi-stage Roots Pumps for Extremely Corrosive Applications

XN series - Multi-stage Roots Pumps

The optimal solution for the most corrosive processes

The dry process pumps of the XN range are made to meet the requirements of most corrosive processes. With a range from 600 to 2,900 m3/h the XN range covers the requirements of most applications where corrosion resistance is key. This innovative technology allows reducing maintenance frequency and increases pumping lifetime. The cost of ownership is drastically reduced, as well as the tool downtime. The XN range pumps are compatible with pumps from other series.

 

ASM 306 S – helium and hydrogen sniffer leak detector

ASM 306 S – Helium and hydrogen sniffer leak detector

Easy and accurate full-time sniffing operations

Experience our new ASM 306 S helium and hydrogen sniffer leak detector from Pfeiffer Vacuum. The ASM 306 S will help you to meet your daily challenges for leakage control using sniffing measurements in emerging technology like e-mobility and hydrogen energy economy or well established applications in refrigeration and air conditioning. The ASM 306 S offers all the advantages of a proven technology regarding sensitivity, accuracy and repeatability. The ASM 306 S can be completed with a 2 years lifetime calibrated leak with both helium and/or hydrogen.

 

HiScroll – the oil-free vacuum pumps

HiScroll – the oil-free vacuum pumps

High safety at lower costs

The HiScroll series consists of three dry and hermetically sealed scroll pumps with a nominal pumping speed of 6 - 20 m3/ h. The pumps are especially characterized by their high performance when evacuating against atmosphere due to their unique features. Their powerful IPM* synchronous motors achieve an efficiency that is up to 15% higher than that of conventional drives.

The integrated two-stage gas ballast and safety valve ensure process-specific and safe operation. HiScroll pumps can be easily connected to other Pfeiffer Vacuum products (such as turbopumps or display and control units) as well as to a higher-level external controller, via RS-485 or ProfiNet. The interface enables RPM regulation, situation-specific control of the fan and monitoring of the pump performance. This helps to minimize wear and noise emissions, and ensures longer maintenance intervals.

 
 

The GSD 350 gas analyzer in 3D

The GSD 350 gas analyzer in 3D

Pfeiffer Vacuum solutions in 360°

Compact, portable benchtop devices for gas analysis at atmospheric pressure. They are used, in particular, in chemical processes, in the semiconductor industry, metallurgy, fermentation, catalysis, freeze-drying and environmental analysis.

These new analyzers offer the advantages of a low detection limit up to 100 ppb (depending on the mass range), a low gas consumption of 1–2 sccm and a quick measuring time (up to 1 ms/u).

Click through our model and learn more about our portable gas analyzers. You can choose between the OmniStar and ThermoStar. The options (corrosive gas and mass calibration unit) can be displayed interactively.

Semiconductor Fab in 3D

Semiconductor fab in 3D

The solutions from Pfeiffer Vacuum in 3D

Semiconductor fabrication takes place under clean-room conditions in the high and ultra-high vacuum range. In order to implement and guarantee such conditions, reliable vacuum equipment of premium quality is a must.

A typical semiconductor fab consists of four levels. At the top level, the cleanroom, the production line as well as special systems for contamination management are located. The level below the cleanroom – the so-called “subfloor” – is where the dry pumps for the evacuation of load-locks and transfer chambers are located. The next level below is where the cooling units, current supplies and RF-generators of the plant are located. The lowest level contains dry pumps and the exhaust gas treatment (abatement) equipment.

Explore our solutions for semiconductor fabs – in 3D and from a 360° perspective! Click through the different floors and components of our semiconductor fab model and learn which products Pfeiffer Vacuum offers to fulfill the diverse requirements!

Individual vacuum solutions for analytics

Individual vacuum solutions for analytics

Solutions from Pfeiffer Vacuum with a 360-degree view

The market for analytical instruments includes every application where a vacuum is required to carry out an analytical process.

As well as research and development, this also includes markets such as:

  • Production monitoring
  • Environmental analysis
  • Portable mass spectrometry
  • Safety inspections

Pfeiffer Vacuum develops customized solutions which are tailored to the specific requirements of its customers. There are numerous and varied possibilities. We are showing only a small selection here out of all the possible vacuum solutions available.

Experience your own particular solution specifically for analytics - in 3D and with a 360-degree view.

Click through the different levels and components of our model and discover which products Pfeiffer Vacuum can offer for your requirements.

The GSD 350 gas analyzer from Pfeiffer Vacuum

GSD 350 gas analyzers for atmospheric pressure

Experience our new OmniStar and ThermoStar GSD 350

Compact, portable benchtop devices for gas analysis at atmospheric pressure. They are used, in particular, in chemical processes, in the semiconductor industry, metallurgy, fermentation, catalysis, freeze-drying and environmental analysis.

These new analyzers offer the advantages of a low detection limit of <100 ppb (depending on the mass range), a low gas consumption of 1 - 2 sccm and a quick measuring time (up to 1 ms/u).

Process optimization for rotary vane pumps

Process optimization for rotary vane pumps

Solutions, taking the Duo 65 as an example

Rotary vane pumps are subjected to severe stress by certain process gases and operating modes. Optimal protection for the pump can be provided by using auxiliary gases. The combination of gas ballast and flushing gas in this form is available only from Pfeiffer Vacuum.

Gas ballast is used primarily in drying, freeze-drying and distillation applications. Flushing gas is the preferred choice for severe loading cases, corrosive applications and all processes that use aggressive media.

If corrosion is prevented, the pump has a longer service life. Longer intervals between oil changes also result in a reduction in costs.

Functional principle of the HiPace turbopump

Functional principle of the HiPace turbopump in 3D

Take a look inside the turbopump

Up to 90,000 rotations per minute, almost speed of sound at the outer radius, vacuum conditions of up to 10 -11 mbar — our turbopumps convince with their performance and reliability.

Accompany the gas molecules on their journey through the turbopump in 3D and learn the functional principle as well as the design of the HiPace from Pfeiffer Vacuum!

High performance Roots pump HiLobe

High performance HiLobe Roots pumps in 3D

New high performance Roots pump HiLobe in 3D

These innovative Roots pumps offer a nominal pumping speed range of 520 - 2,100 m³/h and can be perfectly adjusted to customer-specific requirements.

Functional principle of the OktaLine Roots pump

View inside the OktaLine from Pfeiffer Vacuum

Functional principle of the OktaLine Roots in 3D

Take a look inside the Roots pump from Pfeiffer Vacuum! Learn about the pump components in this 3D sectional model and follow the gas molecules on their way through the OktaLine.

Explore the functional principle and the Roots design.

Functional principle of the A4 multi-stage Roots pump

3D view inside the A4 series

Design and function of the multi-stage Roots pumps from Pfeiffer Vacuum

The processes in the semiconductor industry always provide new challenges for the installed vacuum pumps. The A4 series is based on the proven, energy-efficient multi-stage Roots technology from Pfeiffer Vacuum.

Take a look at what happens inside the pump and follow the gas molecules on their way!

ISO-KF flange system in 3D

ISO-KF flange system from Pfeiffer Vacuum in 3D

Pfeiffer Vacuum manufactures the ISO-KF flange system according to DIN 28403 and ISO 2861.

Explore the designs, the components as well as the functional principle of the ISO-KF flange systems from Pfeiffer Vacuum in a 3D perspective!

Diaphragm pump MVP from Pfeiffer Vacuum in 3D

The MVP diaphragm pump in 3D

Compact design, easy integration into existing systems – the diaphragm pumps from Pfeiffer Vacuum convince with their small footprint. Explore the pump from inside in 3D, learn more about its components and its function!

Rotary vane pump of the DuoLine in 3D

Take a look inside the DuoLine

Rotary vane pump in 3D

Light, compact, powerful – the rotary vane pumps of the DuoLine from Pfeiffer Vacuum are the smallest in their pumping speed spectrum on the market.

Explore the design of the pumps and follow the molecules on their way in 3D!

ISO-K and ISO-F flange systems

ISO-K and ISO-F flange systems

Experience the design, components and functional principle of ISO-K and ISO-F flange systems from Pfeiffer Vacuum in 3D!

PrismaPro quadrupole mass spectrometer in 3D

Functional principle of the PrismaPro quadrupole mass spectrometer

Experience the function and design of the PrismaPro quadrupole mass spectrometer with Faraday and C-SEM detector from Pfeiffer Vacuum. Follow the molecules on their way through the analyzer of the PrismaPro and learn how residual gas analysis is performed in high vacuum!

New leak detectors ASM 390 and ASM 392 in 3D!

Leak detectors ASM 390 and ASM 392 in 3D

Rapid pump down time, high sensitivity, accurate results and minimal detection time: The ASM 390 and ASM 392 are the perfect solution for the semiconductor and the display industries as well as for other demanding applications.

A frictionless backing pump, a powerful high vacuum pump – they are ideal for leak testing in clean environments.

Speed up your leak detection process to reduce the downtime of your production equipment with the ASM 392 – it comes with an additional turbopump!

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