Robust
Perfectly suited for harsh semiconductor processes, nickel coating for increased corrosion resistance, design options for dealing with by-product generation
Reliable
Extended lifetime
Efficient
High-efficiency motors, limited use of electric heaters, cost-efficient
Technical specifications
Markets & applications
Semiconductor applications
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PVD
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Metal & high K etch
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LPCVD / Diffusion
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Oxyde Etch
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Stripping / Ashing
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PECVD
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Annealing
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Si Poly etch
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Light deposition