Residual gas analysis in ultra high vacuum - Pfeiffer Vacuum

Residual gas analysis in ultra high vacuum

PrismaPro® QMG 250 M1, 1–100 amu

This modularly designed compact mass spectrometer can be optimally adapted to your application

PrismaPro® QMG 250 M2, 1–200 amu

This modularly designed compact mass spectrometer can be optimally adapted to your application

PrismaPro® QMG 250 M3, 1–300 amu

This modularly designed compact mass spectrometer can be optimally adapted to your application

PrismaPlus® QMG 220 M1, 1–100 amu

This modularly designed compact mass spectrometer can be optimally adapted to your application
  • Mass range 1–100 amu for optimum resolution and maximum sensitivity
  • Cost-effective residual gas analysis and vacuum process monitoring in the high and ultra high vacuum ranges
  • High measuring speed, stability and resolution
  • Interchangeability of analyzers and electronics
  • Optimum availability thanks to two filaments

PrismaPlus® QMG 220 M2, 1–200 amu

This modularly designed compact mass spectrometer can be optimally adapted to your application
  • Mass range 1–200 amu for residual gas analysis and analytical measurement tasks, even in the higher measurement range
  • Cost-effective residual gas analysis and vacuum process monitoring in the high and ultra high vacuum ranges
  • High measuring speed, stability and resolution
  • Interchangeability of analyzers and electronics
  • Optimum availability thanks to two filaments

PrismaPlus® QMG 220 M3, 1–300 amu

This modularly designed compact mass spectrometer can be optimally adapted to your application
  • Mass range 1–300 amu for residual gas analysis and analytical measurement tasks, even in the higher measurement range
  • Cost-effective residual gas analysis and vacuum process monitoring in the high and ultra high vacuum ranges
  • High measuring speed, stability and resolution
  • Interchangeability of analyzers and electronics
  • Optimum availability thanks to two filaments

Quadrupole mass spectrometers with a secondary electron multiplier offer maximum detection sensitivity in the qualitative analysis of gas composition in an ultra-high vacuum chamber.

For residual gas analysis under high vacuum, extremely small amounts of gas must be detected. A secondary electron multiplier in the Pfeiffer Vacuum residual gas analyzers therefore guarantees a high amplification of the small ion currents supplied by the quadrupole mass filters. All materials used are carefully selected for use in UHV and can withstand high bake-out temperatures.

 
Several ion sources are available for different applications, including a grid ion source with an extremely low outgassing rate.

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