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320VEP063
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EVB 063 PX, Angle valve, pneumatic, with PI, without PV
Order number: 320VEP063

  • Bellows-sealed
  • With visual position indicator
  • Normally closed (n. c.)
  • Service life: 3 million operating cycles
Actuator Pneumatic
Bakeout temperature: actuator, pilot valve 80 °C | 176 °F | 353 K
Bakeout temperature: housing 150 °C | 302 °F | 423 K
Compressed air (overpressure) 4,000-8,000 hPa | 3,000-6,000 Torr | 4,000-8,000 mbar
Conductance value with molecular flow 160 l/s
Connection flange DN 63 ISO-K  
Differential pressure in closing direction 4,000 hPa | 3,000 Torr | 4,000 mbar
Differential pressure in opening direction 1,200 hPa | 900 Torr | 1,200 mbar
Feedthrough Bellows
Stainless steel
Housing Stainless steel
Operating pressure min. 1 · 10-8 hPa | 7.5 · 10-9 Torr | 1 · 10-8 mbar
Position indicator Included
Position indicator: Load capacity ≤ 50 V AC / DC | 5 – 100 mA
Pressure max. (absolute) 4,000 hPa | 3,000 Torr | 4,000 mbar
Seal FKM
Service life 3000000 cycles
Tightness 1 · 10-10 Pa m3/s | 7.5 · 10-10 Torr l/s | 1 · 10-9 mbar l/s
Type Angle valve
Weight 4.8 kg | 10.58 lb

Dimension-TIM-RS

A
232 mm
B
123 mm
C
162.5 mm
D
88 mm
Your local contact
Pfeiffer Vacuum Inc.
24 Trafalgar Square
NH 03063-1988 Nashua
USA

+1 (800) 248-8254
+1 (888) 658-7983
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