Robust
Best-in-class hybrid bearing technology, maximum uptime, nickel-coated surfaces for corrosive applications
Flexible
Extensive portfolio, standard accessories and communication tools
High performance
High pumping speed, excellent compression for light gases
Technical specifications
Markets & applications
Analytics and R&D
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Plasma Physics
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High Energy Physics
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Space Research
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Ultra-High Vacuum
Automotive and transport
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Heat Treatment
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Space Research
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E-Beam Welding
Hospitals and healthcare facilities
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Medical Accelerator
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Diagnostic Imaging
Metallurgy
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E-beam welding
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Vacuum Brazing / Soldering
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Heat Treatment
Semiconductor applications
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PVD
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Inspection & Metrology
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Metal & high K etch
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LPCVD / Diffusion
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Lithography
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Oxyde Etch
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Stripping / Ashing
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ALD
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PECVD
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Si Poly etch
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Load Lock & Transfer
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Light deposition
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Ion Implantation
Thin film coating
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Optical Coating
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Decorative Coating
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Lab coating
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Wear Protection Coating
Accessories
- Electrical adapter
- Mains cable
- Connecting cable
- Display unit
- Safety and mounting kits
- Venting accessories
- Sealing gas accessories