Pfeiffer Vacuum

Residual gas analysis in high vacuum

Quadrupole mass spectrometers with Faraday detectors are the preferred devices for qualitative analysis of the gas composition in a high-vacuum chamber.

Compared with vacuum gauges, quadrupole mass spectrometers offer a much greater wealth of information about the vacuum. A Faraday detector is often sufficient to obtain information about leaks, the release of water vapor or contamination with hydrocarbons under high vacuum. For this purpose, Pfeiffer Vacuum offers a range of quadrupole mass spectrometers with a variety of mass ranges and cathode materials.

Residual gas analysis in high vacuum


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