Pfeiffer Vacuum

Residual gas analysis in ultra high vacuum

Quadrupole mass spectrometers with a secondary electron multiplier offer maximum detection sensitivity in the qualitative analysis of gas composition in an ultra-high vacuum chamber.

For residual gas analysis under high vacuum, extremely small amounts of gas must be detected. A secondary electron multiplier in the Pfeiffer Vacuum residual gas analyzers therefore guarantees a high amplification of the small ion currents supplied by the quadrupole mass filters. All materials used are carefully selected for use in UHV and can withstand high bake-out temperatures.

Several ion sources are available for different applications, including a grid ion source with an extremely low outgassing rate.

Residual gas analysis in ultra high vacuum


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