| Axial force | max. 45 N |
| Bakeout temperature with electric parts | 70 °C | 158 °F | 343 K |
| Bakeout temperature without electric parts | 200 °C | 392 °F | 473 K |
| Fastening | Screws M4 x 5 (on actuator) |
| Maximum load torque at bellows | 0.2 N m |
| Motor type | 2-ph stepping motor |
| Nominal diameter | DN 16 CF |
| Operating temperature | ≤ 65 °C | ≤ 149 °F | ≤ 338 K |
| Path | 25 mm | 0.98 inch |
| Precision | 3 µm |
| Pressure range | 1 · 10-9 hPa to 500 hPa over pressure |
| Resolution | 0.1 µm |
| Service life | 10000 cycles |
| Stroke | 25 mm | 0.98 inch |
| Copper gasket, OFHC copper, DN 16 CF | 490DFL016-S10 |
| File | Type | Language | Date | Filesize | |
|---|---|---|---|---|---|
| Data sheet | EN | 07-06-2022 | ~ 180.3 KB | ||
| Stepfile | STP | EN | 09-02-2021 | ~ 16.6 MB | |
| T | +1 (800) 248-8254 |
| F | +1 (888) 658-7983 |
