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All-metal gas dosing valve, manually actuated, DN 16 CF-R
Order number: 420VED016

  • Suitable for UHV applications
  • Minimum dead volume
  • Operating temperature up to 300 °C
  • For mass spectrometer applications
  • Gas inlet DN 16 CF-R
Actuator Manual
Bakeout temperature Max. 300 °C | Max. 572 °F | Max. 573 K
Conductance value with molecular flow 0.05 l/s
Connection flange (out) DN 16 CF-R
Housing Stainless steel
Inlet pressure max. 1 · 10-10 hPa to 1 MP
Max. controllable gas flow 5 · 102 hPa·l/s
Min. controllable gas flow 1 · 10-10 hPa·l/s
Nominal diameter DN 16 CF
Operating pressure 1 · 10-10 hPa to 1500 hPa (abs.)
Pressure max. 10,000 hPa | 7,500 Torr | 10,000 mbar
Pressure min. 1 · 10-11 hPa | 7.5 · 10-12 Torr | 1 · 10-11 mbar
Tightness 1 · 10-11 Pa m3/s | 7.5 · 10-11 Torr l/s | 1 · 10-10 mbar l/s
Type Gas control valve
Weight 0.94 kg | 2.07 lb

Dimension-TIM-RS

Your local contact
Pfeiffer Vacuum Inc.
24 Trafalgar Square
NH 03063-1988 Nashua
USA

+1 (800) 248-8254
+1 (888) 658-7983
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