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PT M52 380
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SPM 220, for process pressure up to 10 hPa, with orifice flange (differentially pumped), 115–230 V
Order number: PT M52 380

  • SPM 220, Sputtering Process Monitor mass range 1–200 u, 115–230 V, 50/60 Hz, for process gas and residual gas analysis at pressure range 10 hPa > p > 1 · 10-4 hPa consisting of:
  • PrismaPlus with quadrupole electronics QME 220, quadrupole analyzer QMA 200 M with open ion source and two iridium filaments, yttrium oxide coated
  • Differential pressure stage with flange DN 40 CF and orifice 0.1 mm
  • System control unit BRU 220 with power supply TPS 311 and remote connector for external access
  • Turbomolecular pumping station with SplitFlow 80 and backing pump MVP 020-3 DC
  • Total pressure gauge PKR 251
  • Set of cables, 3 meter
  • Quadera®-Software for Windows 7, XP Professional (32bit) for parameterisation of PrismaPlus system and for storage and showing measurement data, includes SPM software add-in for Quadera®.

Easy start of leak detection and residual gas analysis rountines by clicking. Measurement of gas concentrations and partial pressures by integrated matrix calculation. Easy, menu navigated selection of sputtering process measurement routines.

Analyzer with SPM ion source QMA 220
Backing pump MVP 020-3
Cable length 3 m
Detection limit (in argon): Carbon dioxide < 100 ppb
Detection limit (in argon): Hydrogen < 6000 ppb
Detection limit (in argon): Nitrogen < 100 ppb
Detection limit (in argon): Oxygen < 100 ppb
Detection limit (in argon): Water vapor < 500 ppb
Detector C-SEM/Faraday
Flange (in) DN 40 CF-F
Inlet pressure max. 10 hPa
Mass range 1 – 200 u
Process pressure to 10 hPa | 7.5 Torr | 10 mbar
Quadrupole controller QME 220
Rod system: Diameter 6 mm | 0.24 inch
Rod system: Length 100 mm | 3.94 inch
Rod system: Material Stainless steel
Software Quadera®
SPM system controller BRU 220
Supply 115 – 230 V
System control BRU 220
Turbopump HiPace 80 mit TC 110 RS
Weight: Analyzer incl. Turbo 13 kg | 28.66 lb

Dimension-TIM-RS

B
290 mm
C
380 mm
D
395 mm
File Type Language Date Filesize
Data sheet PDF EN 04-01-2020 ~ 608.6 KB
Stepfile STP EN 01-05-2017 ~ 21.8 MB
File Type Language Date Filesize
Operating instructions SPM 220 - Sputter Process Monitor (DA0101BEN) PDF EN 05-10-2012 ~ 6.3 MB
Your local contact
Pfeiffer Vacuum Inc.
24 Trafalgar Square
NH 03063-1988 Nashua
USA

+1 (800) 248-8254
+1 (888) 658-7983
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