High Pressure Analyzer HPA 220

High Pressure Analyzer HPA 220

High pressure analyzer- gas analysis in the range of 1 – 100 u
  • Provides great flexibility thanks to 5 manually or electropneumatically operated gas inlet options for analyzing, monitoring and controlling processes up to a pressure of 50 hPa
  • Easy and flexible system integration through a variety of digital and analog inputs and outputs
  • Multiplex operation allows data evaluation of several mass spectrometer systems with a single PC
  • Compact dimensions for flexible integration
High pressure analyzer- gas analysis in the range of 1 – 200 u
  • Provides great flexibility thanks to 5 manually or electropneumatically operated gas inlet options for analyzing, monitoring and controlling processes up to a pressure of 50 hPa
  • Easy and flexible system integration through a variety of digital and analog inputs and outputs
  • Multiplex operation allows data evaluation of several mass spectrometer systems with a single PC
  • Compact dimensions for flexible integration
High pressure analyzer- gas analysis in the range of 1 – 300 u
  • Provides great flexibility thanks to 5 manually or electropneumatically operated gas inlet options for analyzing, monitoring and controlling processes up to a pressure of 50 hPa
  • Easy and flexible system integration through a variety of digital and analog inputs and outputs
  • Multiplex operation allows data evaluation of several mass spectrometer systems with a single PC
  • Compact dimensions for flexible integration

Gas analysis in the pressure range of up to 50 hPa

The High Pressure Analyzer HPA 220 is a modular and flexibly usable mass spectrometer system with a dry turbo pumping station for gas analysis in a vacuum up to pressures of 50 hPa.

Depending on its use, with the HPA 220, five different electro-pneumatic as well as manually operable gas inlet valves can be selected.

Customer benefits

  • Provides great flexibility thanks to its 5 manually or electro-pneumatically operated gas inlet options for analyzing, monitoring and controlling processes up to a pressure of 50 hPa.
  • Easy and flexible system integration through a variety of digital and analog inputs and outputs.
  • Multiplex operation allows data evaluation of several mass spectrometer systems with a single PC.
  • Compact dimensions for flexible integration.

Applications

  • Analysis, monitoring, and control of vacuum processes in the pressure range of 1 · 10-7 to 50 hPa
  • Manufacturers and operators of vacuum coating systems
  • Semiconductor production
  • Lithography
  • Metallurgy
  • Vacuum furnaces
  • Research and development
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