High Pressure Analyzer HPA 220
High pressure analyzer- gas analysis in the range of 1 – 100 u
- Provides great flexibility thanks to 5 manually or electropneumatically operated gas inlet options for analyzing, monitoring and controlling processes up to a pressure of 50 hPa
- Easy and flexible system integration through a variety of digital and analog inputs and outputs
- Multiplex operation allows data evaluation of several mass spectrometer systems with a single PC
- Compact dimensions for flexible integration
High pressure analyzer- gas analysis in the range of 1 – 200 u
- Provides great flexibility thanks to 5 manually or electropneumatically operated gas inlet options for analyzing, monitoring and controlling processes up to a pressure of 50 hPa
- Easy and flexible system integration through a variety of digital and analog inputs and outputs
- Multiplex operation allows data evaluation of several mass spectrometer systems with a single PC
- Compact dimensions for flexible integration
High pressure analyzer- gas analysis in the range of 1 – 300 u
- Provides great flexibility thanks to 5 manually or electropneumatically operated gas inlet options for analyzing, monitoring and controlling processes up to a pressure of 50 hPa
- Easy and flexible system integration through a variety of digital and analog inputs and outputs
- Multiplex operation allows data evaluation of several mass spectrometer systems with a single PC
- Compact dimensions for flexible integration
Gas analysis in the pressure range of up to 50 hPa
The High Pressure Analyzer HPA 220 is a modular and flexibly usable mass spectrometer system with a dry turbo pumping station for gas analysis in a vacuum up to pressures of 50 hPa.
Depending on its use, with the HPA 220, five different electro-pneumatic as well as manually operable gas inlet valves can be selected.
Customer benefits
- Provides great flexibility thanks to its 5 manually or electro-pneumatically operated gas inlet options for analyzing, monitoring and controlling processes up to a pressure of 50 hPa.
- Easy and flexible system integration through a variety of digital and analog inputs and outputs.
- Multiplex operation allows data evaluation of several mass spectrometer systems with a single PC.
- Compact dimensions for flexible integration.
Applications
- Analysis, monitoring, and control of vacuum processes in the pressure range of 1 · 10-7 to 50 hPa
- Manufacturers and operators of vacuum coating systems
- Semiconductor production
- Lithography
- Metallurgy
- Vacuum furnaces
- Research and development
