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PT M52 130
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HPA 220, for process pressure up to 1 hPa, Double gate valve, manually actuated
Order number: PT M52 130

  • HPA 220, High Pressure Analyzer, mass range 1–200 u, 115–230 V, 50/60 Hz, for process gas and residual gas analysis at pressure range 0,5 hPa > p > 1 • 10-7 hPa, consisting of:
  • PrismaPlus with quadrupole electronics QME 220, quadrupole analyzer QMA 200 M with open ion source and two tungsten filaments
  • Double gate valve, manually operated, connection flange DN 40 CF-F, one gate valve with exchangeable orifice 0.1 mm
  • System control unit BRU 220 with power supply TPS 311 and remote connector for external access
  • Turbo-molecular-pump station with HiPace 80 and roughing pump MVP 020-3 DC
  • Total pressure gauge PKR 251
  • Set of cables, 3 meter
  • Quadera®-Software for Windows 7, XP Professional (32bit) for parameterisation of PrismaPlus system and for storage and showing measurement data
Analyzer QMA 220
Backing pump MVP 020-3
Cable length 3 m
Compressed air 5 – 7 bar
Detection limit min.: C-SEM (hPa) 1 · 10-14 hPa | 7.5 · 10-15 Torr | 1 · 10-14 mbar
Detection limit min.: Faraday (hPa) 1 · 10-11 hPa | 7.5 · 10-12 Torr | 1 · 10-11 mbar
Detector C-SEM/Faraday
Flange (in) DN 40 CF-F
Inlet pressure max. 1 hPa
Mass range 1 – 200 u
Process pressure to 1 hPa | 0.75 Torr | 1 mbar
Quadrupole controller QME 220 M
Rod system: Diameter 6 mm | 0.24 inch
Rod system: Length 100 mm | 3.94 inch
Rod system: Material Stainless steel
Sensitivity for Ar: C-SEM 200 A/hPa
Sensitivity for Ar: Faraday 5 · 10-4 A/hPa
Software Quadera®
SPM system controller BRU 220
Supply 115 – 230 V
System control BRU 220
Turbopump HiPace 80 with TC 110 RS
Valve control unit VCU 220
Valve interface with orifices Ø 0.1 mm und 0.3 mm Double gate valve, manually actuated
Weight: Analyzer incl. Turbo 15 kg | 33.07 lb

Dimension-TIM-RS

B
290 mm
C
380 mm
D
446 mm
File Type Language Date Filesize
Data sheet PDF EN 02-22-2020 ~ 680.2 KB
Stepfile STP EN 01-05-2017 ~ 25.1 MB
File Type Language Date Filesize
Operating instructions HPA 220 - High Pressure Analyzer (DA0100BEN) PDF EN 04-20-2016 ~ 5.7 MB
Your local contact
Pfeiffer Vacuum Inc.
24 Trafalgar Square
NH 03063-1988 Nashua
USA

+1 (800) 248-8254
+1 (888) 658-7983
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