Pfeiffer Vacuum


Integrated pumps for light duty processes
The integrated light duty process pumps with their compact dimensions were specifically developed for flexible integration in semiconductor production facilities. Designed for installation directly on the tool and fast pump down, this series of compact pumps for light applications is the perfect solution for load-lock and transfer chambers as well as for all other non-corrosive applications.

New solution for high throughput applications
Demonstrating again its worldwide leadership in the integrated dry pump market, Pfeiffer Vacuum introduces the A 200 L, new 200 m3/h class product for high throughput applications. With the 100 m3/h class, A 100 L and the 200 m3/h class, A 200 L, Pfeiffer Vacuum provides a complete range to respond to all light duty applications.


  • High throughput
  • Small dimensions
  • Optimized assembly
  • Low cost of ownership


  • Load-lock and transfer chambers
  • Semiconductor production
  • Photovoltaic

Integrated pumps set standards
Since the market introduction of the A 100 L pumps, they have revolutionized the integration of pumps in production facilities for the semiconductor industry. Based on dry multi-stage Roots technology and despite their small footprint, the integrated pumps offer high pumping speeds and short pump down times. Today, integrated light duty pumps are state of the art and the A100 series is installed worldwide in many 300 mm semiconductor fabs.

Integrated pumps for load-lock and transfer chambers
In light duty applications like load-lock and transfer chambers, these pumps rule out vacuum line effects in pump installations. Installation costs for vacuum lines, integration and commissioning are lowered through the use of integrated pumps. The pumps offer reproducible performance during production and are energy efficient. High reliability and long-term stability distinguish the integrated pumps.

Integrated pumps - not just for the semiconductor industry
With dry and particle-free vacuums, short pump down times and high pumping speeds, the integrated pumps offer optimal solutions in photovoltaic equipment as well. Low sound emission and low vibrations are additional benefits of this water-cooled series. The low dimensions guarantee a simple integration in production facilities.

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