Pfeiffer Vacuum


Integrated pumps of the A100 series for light duty processes
The pumps of the A100 series with their compact dimensions were specifically developed for flexible integration in semiconductor production facilities. Designed for installation directly on the tool and fast pump down, this series of compact pumps for light applications is the perfect solution for load-lock and transfer chambers as well as for all other non-corrosive applications.


  • High throughput
  • Small dimensions
  • Optimized assembly
  • Low operating costs


  • Load-lock and transfer chambers
  • Semiconductor production
  • Photovoltaic

Integrated pumps set standards
Since the market integration of the A 100 L pumps, they have revolutionized the integration of pumps in production facilities for the semiconductor industry. Based on dry multi-stage Roots technology and despite their small dimensions, the pumps of the A100 series offer high pumping speeds and short pump down times. Today, integrated light duty pumps are state of the art and the A100 series is installed worldwide in many 300 mm semiconductor fabs.

Integrated pumps for load-lock and transfer chambers
In light duty applications like load-lock and transfer chambers, these pumps rule out vacuum line effects in pump installations. Installation costs for vacuum lines, integration and commissioning are lowered through the use of the A100 series. The pumps offer reproducible performance during production and are energy efficient. High reliability and long-term stability distinguish the pumps of the A100 series.

Integrated pumps - not just for the semiconductor industry
With dry and particle-free vacuums, short pump down times and high pumping speeds, the pumps from the A100 series offer optimal solutions also outside of the semiconductor industry as on photovoltaic equipment for example. Low sound emission and low vibrations are further characteristics of this water-cooled series. The low dimensions guarantee a simple integration in production facilities.


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