Pfeiffer Vacuum

Rotary Piston Pumps

Magentically coupled rotary piston pump. Hermetically sealed. Dry compressing. Air-cooled.
Ideally suited for clean processes and those loaded with particles and dust, the UniDry 50 handles applications with condensation or sublimation at the exhaust side. Furthermore, it is characterized by a low leakage rate and an easy installation.

Customer benefits

  • Different inert gas units, depending on process requirements
  • Low operating costs thanks to air cooling and inert gas consumption
  • Good compatibility with water vapor
  • Dry compressing pump system


  • Backing pump for OktaLine roots pumps 250/500
  • Backing pump for HiPace turbopump
  • Leak detection
  • Load-lock chambers
  • Space simulation
  • Accelerators
  • Analytics
  • Purity gases
  • Drying processes
  • Coating
  • Semiconductor
  • Metallurgy

Rotary Piston Pumps

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