Pfeiffer Vacuum

Rotary Piston Pumps

Magentically coupled rotary piston pump

Ideally suited for clean processes and those loaded with particles and dust, the UniDry 50 handles applications with condensation or sublimation at the exhaust side. Furthermore, it is characterized by a low leakage rate and an easy installation.

Customer benefits

  • Different inert gas units, depending on process requirements
  • Low operating costs thanks to air cooling and inert gas consumption
  • Good compatibility with water vapor
  • Dry compressing pump system


  • Backing pump for OktaLine roots pumps 250/500
  • Backing pump for HiPace turbopump
  • Leak detection
  • Load-lock chambers
  • Space simulation
  • Accelerators
  • Analytics
  • Purity gases
  • Drying processes
  • Coating
  • Semiconductor
  • Metallurgy

Rotary Piston Pumps

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