Pfeiffer Vacuum

ATH 3204 M

5-axis magnetically levitated turbopump with drag stage for a pump speed of up to 3050 l/s for N2

Product description

  • Integrated drive electronics
  • Installation in any orientation
  • Water cooled
  • CE marked and ROHS compliant
  • Heated version (MT) available for corrosive applications.
  • ATH-M large size turbomolecular pump has been introduced for silicon based industry applications, based on long experience for DN320 flange size.

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Your local contact

Pfeiffer Vacuum Inc.
24 Trafalgar Square
NH 03063-1988 Nashua
USA

T: +1 (800) 248-8254
F: +1 (888) 658-7983

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