Non-evaporable Getter Coating (NEG)

Non-evaporable Getter Coating (NEG)

Sputtering is an established deposition technique to coat the inner surfaces of vacuum chambers and components with a thin film of non-evaporable getter (NEG) materials to equip them with autonomous pumping capacity. The technology is based on well-known NEG materials consisting of Titanium (Ti), Vanadium (V), Zirconium (Zr) and it achieves a homogeneous surface coverage with a strong adhesion, even in long bent tubes. The pumping effect starts already at low activation temperatures around 180°C.

Pfeiffer Vacuum’s getter technology
Compared with conventional sputter coating processes, Pfeiffer Vacuum offers an alternative production technology. Our new sputter technology is capable to coat complex structures like crosses, T-pieces and individually designed chambers. Compared with established technologies, it achieves a stronger adhesion of the thin-films on the substrate and deposition rate.

Main applications
Thin-film coatings of non-evaporable getter materials are providing chemical pumping capabilities to the inner surfaces of vacuum chambers and components. This getter technology provides many advantages to solve tasks where stand-alone pumps cannot be used due to geometrical or process-related restrictions.

Main applications of NEG coatings are found in the fields of:

  • Beam lines for accelerators
  • Analytical instrumentation
  • Mobile transport chambers
  • Vibration sensitive experiments
  • Ultra-High Vacuum


Customer benefits

  • Complete customized solutions, including chamber production, non-evaporable getter coating and quality control
  • Non-evaporable getter coatings with low activation temperature
  • Wide range of part geometries possible with new sputter source
  • Strong adhesion of the coating to the substrate


To meet our customers’ requirements, we offer a complete production and quality control chain consisting of:

  • Vacuum calculations and design, including finite element method (FEM)
  • High precision chamber manufacturing
  • Advanced welding technologies, for example laser welding or tungsten inert gas welding
  • Cleanliness for ultra-high vacuum applications
  • Visual surface inspection
  • Helium leak detection
  • Residual gas analysis (RGA)
  • X-ray photoelectron spectroscopy (XPS)
  • Scanning electron microscopy (SEM)


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